公开(公告)号：US4546613A

公开(公告)日：1985-10-15

申请号：US684967

申请日：1984-12-20

申请人： Michael J. Eacobacci ,  Donald A. Olsen

发明人： Michael J. Eacobacci ,  Donald A. Olsen

IPC分类号： F04B37/08 ,  B01D8/00

CPC分类号： F04B37/08 ,  Y10S417/901

摘要： In a cryopump, condensation of gases such as argon, oxygen and nitrogen on surfaces other than the second stage array 38, 40 is avoided to prevent cross over hang up and pressure instability. To prevent condensation of argon, oxygen and nitrogen on the frontal cryopumping array 46, that array is held to a temperature of at least 50.degree. K. A heat load to the first stage increases as the temperature of the first stage drops. That heat load is provided by a high emissivity radiation shield 44 or by a thermal switch 56, 58. Condensation of argon and other gases on the second stage refrigerator cylinder 32 is avoided by a close fitting sleeve 52 positioned over the refrigerator cylinder 32 in thermal contact with the second stage heat sink 30 but out of thermal contact with the cylinder 32.

摘要翻译： 在低温泵中，避免了气流如氩气，氧气和氮气在第二级阵列38,40以外的表面上的冷凝，以防止交叉悬挂和压力不稳定。 为了防止正面低温泵浦阵列46上的氩气，氧气和氮气的冷凝，该阵列被保持在至少50°K的温度。第一级的热负荷随着第一级的温度下降而增加。 该热负荷由高辐射辐射屏蔽44或热开关56,58提供。氩和其它气体在第二级冷藏箱32上的冷凝通过位于冷藏箱32上方的紧密配合的套筒52来避免 与第二级散热器30接触，但不与气缸32热接触。