公开(公告)号：US20250138522A1

公开(公告)日：2025-05-01

申请号：US19011266

申请日：2025-01-06

Applicant: Applied Materials, Inc.

Inventor： Sejune Cheon ,  Jeong Jin Hong ,  Mikyung Shim ,  Xiaoqun Zou ,  Jinkyeong Lee ,  Sang Hong Kim

IPC: G05B23/02

Abstract: A method includes receiving first data associated with measurements taken by a sensor during a first manufacturing procedure of a manufacturing chamber. The method further includes receiving second data. The second data includes reference data associated with the first data. The method further includes providing the first and second data to a comparison model. The method further includes receiving a similarity score from the comparison model, associated with the first and second data. The method further includes performance of a corrective action in view of the similarity score.

公开(公告)号：US20250104984A1

公开(公告)日：2025-03-27

申请号：US18973938

申请日：2024-12-09

Applicant: Applied Materials, Inc.

Inventor： Jeong Jin Hong ,  Sang Hong Kim ,  Mihyun Jang ,  Jin Kyeong Lee ,  Sejune Cheon

IPC: H01J37/32 ,  G05B23/02 ,  G06N20/20

Abstract: A non-transitory machine-readable storage medium includes instructions that, when executed by a processing device, cause the processing device to perform operations. The operations include receiving (i) sensor data indicating a first state of a coating of a processing chamber subsequent to a chamber recovery procedure and (ii) substrate process data indicating a set of process parameter values associated with performing a substrate processing procedure by the processing chamber having the coating in a second state prior to the chamber recovery procedure. The operations further include processing the sensor data and the substrate process data to determine an update to at least one of the set of process parameter values. The operations further include performing a) preparing a notification indicating the update for presentation on a graphical user interface or b) causing the processing chamber to perform a selection of the substrate processing procedure based on the update.

公开(公告)号：US12191126B2

公开(公告)日：2025-01-07

申请号：US17672595

申请日：2022-02-15

Applicant: Applied Materials, Inc.

Inventor： Jeong Jin Hong ,  Sang Hong Kim ,  Mihyun Jang ,  Jin Kyeong Lee ,  Sejune Cheon

IPC: H01J37/32 ,  G05B23/02 ,  G06N20/20

Abstract: The subject matter of this specification can be implemented in, among other things, methods, systems, computer-readable storage medium. A method can include receiving (i) sensor data indicating a first state of an environment of a processing chamber processing a substrate subsequent to a chamber recovery procedure, and (ii) substrate process data indicating a set of process parameter values associated with performing a substrate processing procedure by the processing chamber having the environment in a second state prior to the chamber recovery procedure. The method further includes processing the sensor data and the substrate process data using one or more machine learning models to determine one or more outputs. The one or more outputs include an update to at least one of the set of process parameter values. The update is associated with performing the substrate processing procedure by the processing chamber having the environment in the first state.

公开(公告)号：US12189380B2

公开(公告)日：2025-01-07

申请号：US17586701

申请日：2022-01-27

Applicant: Applied Materials, Inc.

Inventor： Sejune Cheon ,  Jeong Jin Hong ,  Mikyung Shim ,  Xiaoqun Zou ,  Jinkyeong Lee ,  Sang Hong Kim

IPC: G05B23/02

Abstract: A method includes receiving first data associated with measurements taken by a sensor during a first manufacturing procedure of a manufacturing chamber. The method further includes receiving second data. The second data includes reference data associated with the first data. The method further includes providing the first and second data to a comparison model. The method further includes receiving a similarity score from the comparison model, associated with the first and second data. The method further includes performance of a corrective action in view of the similarity score.

公开(公告)号：US20230260767A1

公开(公告)日：2023-08-17

申请号：US17672595

申请日：2022-02-15

Applicant: Applied Materials, Inc.

Inventor： Jeong Jin Hong ,  Sang Hong Kim ,  Mihyun Jang ,  Jin Kyeong Lee ,  Sejune Cheon

IPC: H01J37/32 ,  G06N20/20 ,  G05B23/02

CPC classification number: H01J37/32963 ,  H01J37/32926 ,  G06N20/20 ,  G05B23/0283

Abstract: The subject matter of this specification can be implemented in, among other things, methods, systems, computer-readable storage medium. A method can include receiving (i) sensor data indicating a first state of an environment of a processing chamber processing a substrate subsequent to a chamber recovery procedure, and (ii) substrate process data indicating a set of process parameter values associated with performing a substrate processing procedure by the processing chamber having the environment in a second state prior to the chamber recovery procedure. The method further includes processing the sensor data and the substrate process data using one or more machine learning models to determine one or more outputs. The one or more outputs include an update to at least one of the set of process parameter values. The update is associated with performing the substrate processing procedure by the processing chamber having the environment in the first state.