公开(公告)号：US20230236586A1

公开(公告)日：2023-07-27

申请号：US17586702

申请日：2022-01-27

Applicant: Applied Materials, Inc.

Inventor： Sejune Cheon ,  Jeong Jin Hong ,  Mikyung Shim ,  Xiaoqun Zou ,  Jinkyeong Lee ,  Sang Hong Kim

IPC: G05B19/418

CPC classification number: G05B19/41875 ,  G05B2219/32194 ,  G05B2219/32193

Abstract: A method includes receiving trace sensor data associated with a first manufacturing process of a processing chamber. The method further includes processing the trace sensor data using one or more trained machine learning models that generate a representation of the trace sensor data, and then generate reconstructed sensor data based on the representation of the trace sensor data. The method further includes comparing the trace sensor data to the reconstructed sensor data. The method further includes determining one or more differences between the reconstructed sensor data and the trace sensor data. The method further includes determining whether to recommend a corrective action associated with the processing chamber based on the one or more differences between the trace sensor data and the reconstructed sensor data.

公开(公告)号：US20230237412A1

公开(公告)日：2023-07-27

申请号：US17586700

申请日：2022-01-27

Applicant: Applied Materials, Inc.

Inventor： Sejune Cheon ,  Jeong Jin Hong ,  Mikyung Shim ,  Xiaoqun Zou ,  Jinkyeong Lee ,  Sang Hong Kim

IPC: G06Q10/06 ,  G06N3/08 ,  G06Q50/04

CPC classification number: G06Q10/0639 ,  G06N3/084 ,  G06Q50/04

Abstract: A method includes receiving trace sensor data associated with a first manufacturing process of a manufacturing chamber. The method further includes processing the trace sensor data by a processing device to generate summary data associated with the trace sensor data. The method further includes generating a quality index score based on the summary data. The method further includes providing an alert to a user based on the quality index score. The alert includes an indication that the manufacturing chamber performance does not meet a first threshold.

公开(公告)号：US20240273443A1

公开(公告)日：2024-08-15

申请号：US18634705

申请日：2024-04-12

Applicant: Applied Materials, Inc.

Inventor： Sejune Cheon ,  Jeong Jin Hong ,  Mikyung Shim ,  Xiaoqun Zou ,  Jinkyeong Lee ,  Sang Hong Kim

IPC: G06Q10/0639 ,  G06N3/084 ,  G06Q50/04

CPC classification number: G06Q10/0639 ,  G06N3/084 ,  G06Q50/04

Abstract: A method includes receiving trace sensor data associated with a first manufacturing process of a manufacturing chamber. The method further includes processing the trace sensor data by a processing device to generate summary data associated with the trace sensor data. Generating the summary data includes identifying a steady state and transient portion of the trace sensor data and generating a first and second portion of summary data based on the steady state and transient portions. The method further includes generating a quality index score based on the summary data. The method further includes providing an alert to a user based on the quality index score. The alert includes an indication that the manufacturing chamber performance does not meet a first threshold.

公开(公告)号：US11961030B2

公开(公告)日：2024-04-16

申请号：US17586700

申请日：2022-01-27

Applicant: Applied Materials, Inc.

Inventor： Sejune Cheon ,  Jeong Jin Hong ,  Mikyung Shim ,  Xiaoqun Zou ,  Jinkyeong Lee ,  Sang Hong Kim

IPC: G06Q10/0639 ,  G06N3/084 ,  G06Q50/04

CPC classification number: G06Q10/0639 ,  G06N3/084 ,  G06Q50/04

Abstract: A method includes receiving trace sensor data associated with a first manufacturing process of a manufacturing chamber. The method further includes processing the trace sensor data by a processing device to generate summary data associated with the trace sensor data. The method further includes generating a quality index score based on the summary data. The method further includes providing an alert to a user based on the quality index score. The alert includes an indication that the manufacturing chamber performance does not meet a first threshold.

公开(公告)号：US20230259112A1

公开(公告)日：2023-08-17

申请号：US17586701

申请日：2022-01-27

Applicant: Applied Materials, Inc.

Inventor： Sejune Cheon ,  Jeong Jin Hong ,  Mikyung Shim ,  Xiaoqun Zou ,  Jinkyeong Lee ,  Sang Hong Kim

IPC: G05B23/02

CPC classification number: G05B23/0254 ,  G05B23/0283

Abstract: A method includes receiving first data associated with measurements taken by a sensor during a first manufacturing procedure of a manufacturing chamber. The method further includes receiving second data. The second data includes reference data associated with the first data. The method further includes providing the first and second data to a comparison model. The method further includes receiving a similarity score from the comparison model, associated with the first and second data. The method further includes performance of a corrective action in view of the similarity score.

公开(公告)号：US12298748B2

公开(公告)日：2025-05-13

申请号：US17586702

申请日：2022-01-27

Applicant: Applied Materials, Inc.

Inventor： Sejune Cheon ,  Jeong Jin Hong ,  Mikyung Shim ,  Xiaoqun Zou ,  Jinkyeong Lee ,  Sang Hong Kim

IPC: G05B19/418

Abstract: A method includes receiving trace sensor data associated with a first manufacturing process of a processing chamber. The method further includes processing the trace sensor data using one or more trained machine learning models that generate a representation of the trace sensor data, and then generate reconstructed sensor data based on the representation of the trace sensor data. The method further includes comparing the trace sensor data to the reconstructed sensor data. The method further includes determining one or more differences between the reconstructed sensor data and the trace sensor data. The method further includes determining whether to recommend a corrective action associated with the processing chamber based on the one or more differences between the trace sensor data and the reconstructed sensor data.

公开(公告)号：US20250138522A1

公开(公告)日：2025-05-01

申请号：US19011266

申请日：2025-01-06

Applicant: Applied Materials, Inc.

Inventor： Sejune Cheon ,  Jeong Jin Hong ,  Mikyung Shim ,  Xiaoqun Zou ,  Jinkyeong Lee ,  Sang Hong Kim

IPC: G05B23/02

Abstract: A method includes receiving first data associated with measurements taken by a sensor during a first manufacturing procedure of a manufacturing chamber. The method further includes receiving second data. The second data includes reference data associated with the first data. The method further includes providing the first and second data to a comparison model. The method further includes receiving a similarity score from the comparison model, associated with the first and second data. The method further includes performance of a corrective action in view of the similarity score.

公开(公告)号：US12189380B2

公开(公告)日：2025-01-07

申请号：US17586701

申请日：2022-01-27

Applicant: Applied Materials, Inc.

Inventor： Sejune Cheon ,  Jeong Jin Hong ,  Mikyung Shim ,  Xiaoqun Zou ,  Jinkyeong Lee ,  Sang Hong Kim

IPC: G05B23/02

Abstract: A method includes receiving first data associated with measurements taken by a sensor during a first manufacturing procedure of a manufacturing chamber. The method further includes receiving second data. The second data includes reference data associated with the first data. The method further includes providing the first and second data to a comparison model. The method further includes receiving a similarity score from the comparison model, associated with the first and second data. The method further includes performance of a corrective action in view of the similarity score.