公开(公告)号：US20160077016A1

公开(公告)日：2016-03-17

申请号：US14946693

申请日：2015-11-19

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Yoram Uziel ,  Ron Naftali ,  Ofer Adan ,  Haim Feldman ,  Ofer Shneyour ,  Ron Bar-Or

IPC: G01N21/88 ,  G01Q60/24 ,  G01Q20/02

CPC classification number: G01N21/88 ,  G01Q10/065 ,  G01Q20/02 ,  G01Q60/06 ,  G01Q60/24 ,  G01Q70/06

Abstract: There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.

Abstract translation: 可以提供可以包括包括原子力显微镜（AFM）和固体浸没透镜的空间传感器的评估系统。 AFM布置成产生表示固体浸没透镜和基底之间的空间关系的空间关系信息。 所述控制器被布置为接收所述空间关系信息，并且向所述至少一个位置校正元件发送校正信号，以在所述固体浸没透镜和所述基板之间引入期望的空间关系。

公开(公告)号：US20140231632A1

公开(公告)日：2014-08-21

申请号：US13772287

申请日：2013-02-20

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Yoram Uziel ,  Alon Litman ,  Ofer Adan ,  Ron Naftali ,  Juergen Frosien

IPC: G01J1/04

CPC classification number: G01J1/0266 ,  G01J1/0422 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G02B13/001 ,  G02B21/0016 ,  G02B21/24

Abstract: An evaluation system that includes a miniature module that comprises a miniature objective lens and a miniature supporting module; wherein the miniature supporting module is arranged, when placed on a sample, to position the miniature objective lens at working distance from the sample; wherein the miniature objective lens is arranged to gather radiation from an area of the sample when positioned at the working distance from the sample; a sensor arranged to detect radiation that is gathered by the miniature objective lens to provide detection signals indicative of the area of the sample.

Abstract translation: 一种包括微型模块的评估系统，包括微型物镜和微型支撑模块; 其中所述微型支撑模块布置在放置在样本上以使所述微型物镜定位在距离所述样品的工作距离处; 其中所述微型物镜被布置成在距所述样品的工作距离处定位时收集来自所述样品的区域的辐射; 传感器，被布置成检测由微型物镜聚集的辐射，以提供指示样品面积的检测信号。