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公开(公告)号：US20210151214A1
公开(公告)日：2021-05-20
申请号：US16689567
申请日：2019-11-20
摘要： A method and a system. The system may include (a) evaluation units, (b) an object distribution system for receiving the objects and distributing the objects between the evaluation units, and (c) at least one controller. Each evaluation unit may include (i) a chamber housing that has an inner space, (ii) a chuck, (iii) a movement system that is configured to move the chuck, and (iv) a charged particle module that is configured to irradiate the object with a charged particle beam, and to detect particles emitted from the object. In each evaluation unit a length of the inner space is smaller than twice a length of the object, and a width of the inner space is smaller than twice a width of the object.
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公开(公告)号：US10446434B2
公开(公告)日：2019-10-15
申请号：US15134306
申请日：2016-04-20
发明人： Doron Korngut , Yuri Belenky , Yoram Uziel , Ron Naftali , Ron Bar-or , Yuval Gronau
IPC分类号： B25B1/00 , H01L21/687 , H01L21/67 , B25B11/02 , B32B38/18 , B25B1/24 , B23B31/08 , B32B37/00
摘要： According to an embodiment, a support module is provided for supporting a substrate. The support module may include a chuck and a vertical stage. The chuck may include multiple chuck segments that are independently movable. When the substrate is positioned on the chuck, different chuck segments are positioned under different areas of the substrate. The vertical stage may include multiple piezoelectric motors. Each piezoelectric motor may be configured to perform nanometric scale elevation and lowering movements. The multiple piezoelectric motors may be configured to independently move the multiple chuck segments.
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公开(公告)号：US20160077016A1
公开(公告)日：2016-03-17
申请号：US14946693
申请日：2015-11-19
发明人： Yoram Uziel , Ron Naftali , Ofer Adan , Haim Feldman , Ofer Shneyour , Ron Bar-Or
摘要： There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.
摘要翻译： 可以提供可以包括包括原子力显微镜（AFM）和固体浸没透镜的空间传感器的评估系统。 AFM布置成产生表示固体浸没透镜和基底之间的空间关系的空间关系信息。 所述控制器被布置为接收所述空间关系信息，并且向所述至少一个位置校正元件发送校正信号，以在所述固体浸没透镜和所述基板之间引入期望的空间关系。
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公开(公告)号：US20140231632A1
公开(公告)日：2014-08-21
申请号：US13772287
申请日：2013-02-20
发明人： Yoram Uziel , Alon Litman , Ofer Adan , Ron Naftali , Juergen Frosien
IPC分类号： G01J1/04
CPC分类号： G01J1/0266 , G01J1/0422 , G01N21/8806 , G01N21/9501 , G01N21/956 , G02B13/001 , G02B21/0016 , G02B21/24
摘要： An evaluation system that includes a miniature module that comprises a miniature objective lens and a miniature supporting module; wherein the miniature supporting module is arranged, when placed on a sample, to position the miniature objective lens at working distance from the sample; wherein the miniature objective lens is arranged to gather radiation from an area of the sample when positioned at the working distance from the sample; a sensor arranged to detect radiation that is gathered by the miniature objective lens to provide detection signals indicative of the area of the sample.
摘要翻译： 一种包括微型模块的评估系统，包括微型物镜和微型支撑模块; 其中所述微型支撑模块布置在放置在样本上以使所述微型物镜定位在距离所述样品的工作距离处; 其中所述微型物镜被布置成在距所述样品的工作距离处定位时收集来自所述样品的区域的辐射; 传感器，被布置成检测由微型物镜聚集的辐射，以提供指示样品面积的检测信号。
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公开(公告)号：US10068748B2
公开(公告)日：2018-09-04
申请号：US15371332
申请日：2016-12-07
发明人： Yoram Uziel , Benzion Sender , Doron Aspir , Yohanan Madmon , Ron Naftali , Yuri Belenky
CPC分类号： H01J37/28 , G06T7/0004 , G06T2207/30148 , H01J37/20 , H01J2237/20228 , H01J2237/2817
摘要： A method for scanning an object, the method may include moving an object by a first mechanical stage that follows a first scan pattern; introducing multiple movements, by a second mechanical stage, between the object and the first mechanical stage while the first mechanical stage follows the first scan pattern; and obtaining, by optics, images of multiple suspected defects while the first mechanical stage follows the first scan pattern; wherein a weight of the first mechanical stage exceeds a weight of the second mechanical stage.
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公开(公告)号：US09997328B2
公开(公告)日：2018-06-12
申请号：US15160972
申请日：2016-05-20
发明人： Michael R. Rice , Ron Naftali , Natan Schlimoff , Igor Krivts (Krayvitz) , Israel Avneri , Yoram Uziel , Zvika Rozenberg , Erez Admoni , Yochanan Madmon
CPC分类号： H01J37/18 , G01N21/9501 , G01N2201/023 , G02B21/26 , H01J37/20 , H01J2237/022 , H01J2237/182 , H01J2237/202 , H01L21/67126 , H01L21/6719 , H01L21/67196 , H01L21/67242
摘要： Chamber elements defining an internal chamber to be utilized during a substrate related stage selected from the group consisting of substrate manufacturing stage and substrate inspection stage, the chamber elements comprising: a first element having a first surface; a second element having a second surface about the periphery of the internal chamber; a third element connected to the second element; and a clamping mechanism that is connected to the second and third elements and is arranged to press the second element towards the first element; wherein a first area of the first surface and a second area of the second surface come into proximity with each other at a first interface; wherein the first surface is positioned above the second surface; wherein a gas groove and a vacuum groove are formed in the second area; wherein the second element comprises a gas conduit that is arranged to provide gas to the gas groove and a vacuum conduit that is arranged to provide vacuum to the vacuum groove; wherein a provision of the gas and the vacuum assists in a formation of a gas cushion between the first and second areas; wherein the chamber elements are operable to partially surround a first portion of a movement system and a substrate during the substrate related stage, the movement system is arranged to introduce a movement of the first element in relation to the second element and the third element, wherein the gas cushion maintains predefined conditions in the internal chamber during the movement.
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公开(公告)号：US09835563B2
公开(公告)日：2017-12-05
申请号：US14946693
申请日：2015-11-19
发明人： Yoram Uziel , Ron Naftali , Ofer Adan , Haim Feldman , Ofer Shneyour , Ron Bar-Or , Doron Korngut
摘要： There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.
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公开(公告)号：US11803961B2
公开(公告)日：2023-10-31
申请号：US17495493
申请日：2021-10-06
发明人： Ron Naftali , Yariv Simovitch , Guy Shwartz , Ido Almog
IPC分类号： G06T7/00 , G01N21/95 , G01N21/956
CPC分类号： G06T7/001 , G01N21/9501 , G01N21/95607 , G06T2207/30148
摘要： Disclosed herein is s computer-based method for obtaining and analyzing multi-die scan data of a patterned wafer. The method includes sequentially implementing an operation of scanning a respective plurality of sets of slices on a wafer, and, per each slice segment in a multiplicity of slice segments in the plurality of sets of slices, an operation of performing die-to-multi-die (D2MD) analysis of scan data of the slice segment in order to detect defects in the slice segment. Each set of slices may constitute a subset of the totality of slices on the respective die-column. Sets scanned in a same implementation are analogous to one another, thereby facilitating—in the die-to-multi-die analysis of scan data of a slice segment—taking into account, as reference, scan data of areas on other die-columns, which were scanned in the same implementation.
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公开(公告)号：US20200051777A1
公开(公告)日：2020-02-13
申请号：US16057762
申请日：2018-08-07
发明人： Ofer Shneyour , Ron Naftali , Ronnie Porat
IPC分类号： H01J37/22 , H01J37/305 , H01J37/28
摘要： A method for evaluating a region of an object, the method may include repeating, for each sub-region out of a first sub-region of the region till a penultimate sub-region of the region, the steps of: (a) acquiring, by a charged particle imager, a charged particle image of the sub-region; and (b) milling, by a charged particle miller, the sub-region to expose another sub-region of region; acquiring, by the charged particle imager, a charged particle image of a last sub-region of the region; and generating three-dimensional information about a content of the region based on charge particle images of the first sub-region till last sub-region of the region.
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公开(公告)号：US10060736B1
公开(公告)日：2018-08-28
申请号：US15134771
申请日：2016-04-21
发明人： Amir Moshe Sagiv , Yoram Uziel , Haim Feldman , Ron Naftali
IPC分类号： G01B15/00
CPC分类号： G01B15/00
摘要： A method for determining a distance between a near field sensor and a substrate, the method may include creating a diffraction pattern by illuminating, with a beam of coherent radiation having a wavelength that does not exceed twenty nanometers, a slit that is formed between the substrate and an opaque element; detecting, by a detector, multiple portions of the diffraction pattern and generating detection signals indicative of the multiple portions of the diffraction pattern; processing the detection signals to determine a height of the slit; and determining the distance between the near field sensor and the substrate based upon (a) the height of the slit, and (b) a relationship between the height of the slit and a location of the near field sensor.
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