公开(公告)号：US20140015151A1

公开(公告)日：2014-01-16

申请号：US13940102

申请日：2013-07-11

Applicant: CKD CORPORATION

Inventor： Masayuki KOUKETSU ,  Hiroshi ITAFUJI ,  Masayo OKADA

IPC: B01F3/04

CPC classification number: B01F3/04 ,  B01D1/22 ,  B01D1/221 ,  B05B9/03

Abstract: A liquid vaporizer includes a first housing having a liquid-supplied surface to which a chemical solution is supplied, a heater, a mesh, a first holder and a second holder attached to the outer edge portions of the mesh, the outer edge portions opposing each other in a direction of spreading of the mesh, first cover bolts, stems supported by the first housing so as to be movable along a specific direction inclined with respect to the liquid-supplied surface, second cover bolts, coil springs biasing the stems along the specific direction and bring the mesh into intimate contact with the liquid-supplied surface, and a lid member covering the mesh from a side of the liquid-supplied surface to seal a space around the liquid-supplied surface with the first housing.

Abstract translation: 液体蒸发器包括：第一壳体，其具有供应化学溶液的液体供应表面，加热器，网状物，第一保持器和附接到网状物的外边缘部分的第二保持器， 第一盖螺栓，由第一壳体支撑的杆，沿着相对于液体供应表面倾斜的特定方向可移动;第二盖螺栓，螺旋弹簧，其沿着所述第一壳体的方向倾斜， 使所述网状物与所述液体供给面紧密接触，以及从所述液体供给面的一侧覆盖所述网状物的盖部件，以利用所述第一壳体密封所述液体供给面周围的空间。

公开(公告)号：US20130081712A1

公开(公告)日：2013-04-04

申请号：US13631003

申请日：2012-09-28

Applicant: CKD CORPORATION

Inventor： Masayuki KOUKETSU ,  Hiroshi ITAFUJI

IPC: F16K49/00

CPC classification number: F16K49/002 ,  B01B1/005 ,  Y10T137/6416

Abstract: A liquid control apparatus that controls a spread of a liquid has a main body that has a supply subject surface onto which the liquid is supplied. The apparatus also has a mesh form body that is woven into a mesh form and provided to contact the supply subject surface. A heater that heats the supply subject surface is provided in an interior of the main body. A supply port is provided in the main body to supply the liquid from the interior of the main body to a part of the supply subject surface contacted by the mesh form body. A groove is provided in the supply subject surface to suppress spreading of the liquid from the supply port to a side opposite to the heater in an expanse direction of the supply subject surface.

Abstract translation: 控制液体扩​​散的液体控制装置具有主体，该主体具有供应对象表面，液体被供应到主体表面。 该装置还具有网状物体，其被编织成网状并设置成与供应物体表面接触。 在主体的内部设置加热供给对象面的加热器。 供给口设置在主体中，以将液体从主体的内部供给到与网状体接触的供给对象面的一部分。 在供给对象表面设置有凹槽，以抑制液体从供给口到供电对象表面的宽度方向上与加热器相反的一侧的扩展。