公开(公告)号：US20140015151A1

公开(公告)日：2014-01-16

申请号：US13940102

申请日：2013-07-11

Applicant: CKD CORPORATION

Inventor： Masayuki KOUKETSU ,  Hiroshi ITAFUJI ,  Masayo OKADA

IPC: B01F3/04

CPC classification number: B01F3/04 ,  B01D1/22 ,  B01D1/221 ,  B05B9/03

Abstract: A liquid vaporizer includes a first housing having a liquid-supplied surface to which a chemical solution is supplied, a heater, a mesh, a first holder and a second holder attached to the outer edge portions of the mesh, the outer edge portions opposing each other in a direction of spreading of the mesh, first cover bolts, stems supported by the first housing so as to be movable along a specific direction inclined with respect to the liquid-supplied surface, second cover bolts, coil springs biasing the stems along the specific direction and bring the mesh into intimate contact with the liquid-supplied surface, and a lid member covering the mesh from a side of the liquid-supplied surface to seal a space around the liquid-supplied surface with the first housing.

Abstract translation: 液体蒸发器包括：第一壳体，其具有供应化学溶液的液体供应表面，加热器，网状物，第一保持器和附接到网状物的外边缘部分的第二保持器， 第一盖螺栓，由第一壳体支撑的杆，沿着相对于液体供应表面倾斜的特定方向可移动;第二盖螺栓，螺旋弹簧，其沿着所述第一壳体的方向倾斜， 使所述网状物与所述液体供给面紧密接触，以及从所述液体供给面的一侧覆盖所述网状物的盖部件，以利用所述第一壳体密封所述液体供给面周围的空间。