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公开(公告)号：US20170278630A1
公开(公告)日：2017-09-28
申请号：US15619268
申请日：2017-06-09
Applicant: CKD Corporation
Inventor： Akihiro ITO , Masayuki KOUKETSU , Takashi YAMAGUCHI , Takeshi FUKUDA
CPC classification number: H01F41/125 , H01F5/003 , H01F5/06 , H01F7/08 , H01F27/2876 , H01F27/322 , H01F27/323 , H01F41/041 , H01F41/122 , H01F2007/068
Abstract: A method produces a coil sheet from an initial coil sheet in which a conductor layer, a thermally resistant insulating layer, a thermosetting, uncured adhesive layer, and a base layer are stacked in this order. The method includes a first cutting step of cutting the conductor layer into a predetermined shape through etching, and a second cutting step of cutting, after the first cutting step, the insulating layer and the adhesive layer into the predetermined shape through etching.
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12.发明申请ARMATURE COIL FOR ELECTROMAGNETIC ACTUATOR, ELECTROMAGNETIC ACTUATOR, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开电动执行机构电磁线圈，电磁致动器，曝光装置及装置制造方法公开(公告)号：US20160336101A1
公开(公告)日：2016-11-17
申请号：US14916725
申请日：2014-09-04
Applicant: CKD CORPORATION , NIKON CORPORATION
Inventor： Akihiro ITO , Masayuki KOUKETSU , Shigeru MORIMOTO , Hiromitsu YOSHIMOTO , Koji TANAKA
CPC classification number: H01F5/06 , G03F7/70758 , H01F5/00 , H01F7/08 , H01F27/2847 , H01F2027/2857 , H02K3/04 , H02K3/47 , H02K41/031
Abstract: Disclosed is an armature coil that constitutes a stator of an X-axis linear motor and that generates a magnetic field by passing a current therethrough, the armature coil comprising: a band-shaped electroconductive layer that is made of copper and that is wound around a predetermined winding axis; a band-shaped insulating layer that is provided between opposing surfaces of the electroconductive layer, and that electrically insulates the opposing electroconductive layers from one another; and bonding layer that bonds together the opposing surfaces of the electroconductive layer with the insulating layer therebetween.
Abstract translation: 公开了构成X轴线性电动机的定子并通过使电流通过其产生磁场的电枢线圈，电枢线圈包括：由铜制成的带状导电层， 预定绕线轴; 带状绝缘层，设置在导电层的相对表面之间，并使相对的导电层彼此电绝缘; 以及将导电层的相对表面与绝缘层粘合在一起的结合层。
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公开(公告)号：US20190011052A1
公开(公告)日：2019-01-10
申请号：US16127807
申请日：2018-09-11
Applicant: CKD Corporation
Inventor： Akihiro ITO , Masayuki KOUKETSU , Keiichi NISHIKAWA , Yasuhisa HIROSE , Takahiro MINATANI
Abstract: The flow path switching valve includes (a) a valve body having an open flow path which opens on a predetermined surface over a predetermined length in a predetermined direction, (b) a main body having a plurality of ports which open on a facing surface facing the predetermined surface at an interval shorter than the predetermined length in the predetermined direction, and a plurality of connection flow paths connected to the plurality of ports, (c) plate springs attached on both ends of the valve body in the predetermined direction so as to support the valve body such that a predetermined gap is formed between the predetermined surface and the facing surface, the plate springs applying elastic force onto the valve body according to a movement amount of the valve body in the predetermined direction, and (d) an actuator which drives the valve body back and forth in the predetermined direction.
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Patent Agency Ranking
公开(公告)号：US20180023723A1
公开(公告)日：2018-01-25
申请号：US15649390
申请日：2017-07-13
Applicant: CKD Corporation
Inventor： Akihiro ITO , Masayuki KOUKETSU
IPC: F16K31/06
CPC classification number: F16K31/0693 , F16K11/0655 , F16K31/0617
Abstract: An electromagnetic actuator includes a pair of plate springs each of which is configured to produce elastic force in a predetermined direction in accordance with an amount of deformation; a movable member supported by the pair of plate springs to be movable in the predetermined direction; and a drive unit which is configured to drive the movable member in the predetermined direction in a non-contact state by means of electromagnetic force to be applied between the pair of plate springs in the predetermined direction.
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公开(公告)号：US20170278620A1
公开(公告)日：2017-09-28
申请号：US15619072
申请日：2017-06-09
Applicant: CKD Corporation
Inventor： Akihiro ITO , Masayuki KOUKETSU , Hideki GODA , Takashi TASAKI , Kazuhiro IZUMOTO
Abstract: A coil sheet includes a conductor layer, a thermally resistant organic insulating layer, a thermosetting adhesive layer in a B-stage state, and a base layer, such that the conductor layer and the insulating layer are bonded to the base layer with the adhesive layer. A coil is formed of a laminate sheet including a conductor layer, an insulating layer, and an adhesive layer of the coil sheet which are released from the base layer thereof, wherein the laminate sheet is wound around a specific axis a plurality of times, and the adhesive layer is thermally cured.
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16.发明申请ELECTROMAGNETIC COIL, METHOD OF MANUFACTURING ELECTROMAGNETIC COIL, AND ELECTROMAGNETIC ACTUATOR 有权电磁线圈，制造电磁线圈的方法和电磁致动器公开(公告)号：US20150332828A1
公开(公告)日：2015-11-19
申请号：US14812922
申请日：2015-07-29
Applicant: CKD CORPORATION
Inventor： Masayuki KOUKETSU , Akihiro ITO , Kazutoshi ITOH , Takashi HOSONO , Sadayoshi MUTO
CPC classification number: H01F5/06 , F16K31/0675 , F16K49/00 , H01F5/00 , H01F7/08 , H01F27/08 , H01F41/064 , H01F41/125 , H01J35/14 , H01J2235/087 , H01J2235/1287 , Y10T29/49073 , Y10T137/6416
Abstract: An electromagnetic coil includes a conductor winding 12a formed by winding a conductor 12b a plurality of times about a predetermined axis, and a ceramic layer 12c formed through thermal spraying on an axial end surface of the conductor winding 12a, and having a flattened surface. A maximal value t12 of thickness of the ceramic layer 12c is set to three times or less a maximal value t11 of depth of the recesses formed at the surface of turns of the conductor 12b at the axial end surface.
Abstract translation: 电磁线圈包括通过围绕预定轴线多次缠绕导体12b而形成的导体绕组12a，以及通过热喷涂形成在导体绕组12a的轴向端面上并具有扁平表面的陶瓷层12c。 将陶瓷层12c的厚度的最大值t12设定为在轴向端面处形成在导体12b的匝面的凹部的深度的最大值t11的三倍以下。
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公开(公告)号：US20130313458A1
公开(公告)日：2013-11-28
申请号：US13957299
申请日：2013-08-01
Applicant: CKD CORPORATION
Inventor： Masayuki KOUKETSU , Hiroshi ITAFUJI
IPC: F16K3/06
CPC classification number: F16K3/06 , F16J1/01 , F16K31/1262 , F16K51/02 , H01L21/67017
Abstract: A vacuum control valve connected between a vacuum chamber and a vacuum pump includes a control valve main body having a valve seat formed in a vacuum flow passage, a valve body that manipulates the valve opening by performing a linear motion to adjust a lift, a rod that transmits driving force from a linear driving unit that generates the driving force, a sliding/sealing member that seals the vacuum flow passage while allowing the rod to slide, and a cylindrical member that covers a sliding range of the rod. The sliding range includes a range movable from a valve body flow passage side to an exterior side. The cylindrical member has an outer peripheral surface, a working fluid absorption amount per unit area of the outer peripheral surface being smaller than that of an outer surface of the rod.
Abstract translation: 连接在真空室和真空泵之间的真空控制阀包括具有形成在真空流路中的阀座的控制阀主体，通过执行线性运动来调节升程来操纵阀开口的阀体，杆 其从产生驱动力的线性驱动单元传递驱动力，在允许杆滑动的同时密封真空流路的滑动/密封构件以及覆盖杆的滑动范围的圆筒构件。 滑动范围包括从阀体流路侧向外侧移动的范围。 圆柱形构件具有外周面，外周面的每单位面积的工作流体吸收量小于杆的外表面的工作流体吸收量。
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公开(公告)号：US20130193230A1
公开(公告)日：2013-08-01
申请号：US13752232
申请日：2013-01-28
Applicant: CKD CORPORATION
Inventor： Masayuki KOUKETSU , Hiroshi ITAFUJI
IPC: B05B9/03
Abstract: A liquid control apparatus 30 controls a spread mode of a liquid. The liquid control apparatus 30 includes a main body 31 having an upper surface 31c to which the liquid is supplied, and a mesh 47 knitted in a net-like shape and provided to be in contact with the upper surface 31c. An inhibiting groove 41 is provided in the upper surface 31c in a portion that is in contact with the mesh 47. An introducing port 33b for introducing a gas from the inside of the main body 31 into the inhibiting groove 41 is provided in the main body 31. The introducing port 33b is formed such that the gas is introduced into the inhibiting groove 41 substantially parallel to the upper surface 31c.
Abstract translation: 液体控制装置30控制液体的扩散模式。 液体控制装置30包括主体31，主体31具有供给液体的上表面31c和网状47，网47形成为与上表面31c接触。 在上表面31c中设置有与网47接触的部分的抑制槽41.用于将主体31内部的气体引入抑制槽41的引入口33b设置在主体 引入口33b形成为使得气体基本上平行于上表面31c引入到抑制槽41中。
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