摘要:
The present invention provides methods and apparatus for evaporating a metal oxide layer precursor, including charging a liquid precursor, spraying the charged liquid precursor to form minute droplets; and vaporizing a solvent from the minute droplets. Methods of forming a dielectric layer are also provided.
摘要:
A heat exchanger for a dryer includes a plurality of tubes for circulating wet air and a plurality of fin structures for circulating external air which are alternately laminated together to form the heat exchanger. The fin structure includes a plurality of air passages formed by repeatedly bending a flat-type metal plate in a zigzag form. A plurality of fins are formed on side surfaces of the air passages. The fins protrude from the side surfaces of the air passages at an inclination angle. The fins are formed by partially cutting the plate forming the side surfaces of the air passages, and by the bending the cut portions of the plate into the air passages to from the fins. A heat transfer area and a heat transfer efficiency are increased, thereby enhancing a drying efficiency of a dryer having the heat exchanger.