公开(公告)号：US20050100072A1

公开(公告)日：2005-05-12

申请号：US10925746

申请日：2004-08-24

申请人： Rajasekhar Rao ,  Weiman Zhang ,  James Howey ,  Gamaralalage Padmabandu ,  Paolo Zambon ,  Richard Sandstrom

发明人： Rajasekhar Rao ,  Weiman Zhang ,  James Howey ,  Gamaralalage Padmabandu ,  Paolo Zambon ,  Richard Sandstrom

IPC分类号： H01S3/22

CPC分类号： G03F7/70183 ,  G02B27/0927 ,  G03F7/70025

摘要： A high power gas discharge laser for and method of producing laser output light pulses of high energy density is disclosed which may comprise a laser output light pulse beam optical track having a plurality of modular components arranged in order from a laser light source to a laser system output port and defining a laser output light pulse beam path having a single centerline axis; a first optical module and a second optical module in series in the optical track; a flexible interface element intermediate the first and the second optical module and rigidly attached to each of the first and second optical modules; and an optical element having a fixed position in the output laser pulse beam path comprising a rigid attachment to the first optical module, and extending within the flexible interface element. The optical element may comprise a beam expander, which may comprise a lensed beam expander. The optical element may comprise at least a part of a telescoping lens set forming an optical beam expander and the at least a part of a telescoping lens set comprises the entire telescoping lens set forming the optical beam expander or the at least a part of a telescoping lens set may comprise a first part of the beam expander cooperating with at least a second part located in a subsequent optical module in the laser output pulse beam optical track along the same optical centerline axis. A plurality of aligning mechanisms may align the optical element to a first and a second axis of the laser output pulse beam, the first and second axes being generally orthogonal to each other and orthogonal to the optical centerline axis, and also along the optical centerline axis. The beam expander may incorporate as one optic the output coupler optic and may have a moveable lens to enable a range of magnifications.

摘要翻译： 公开了一种用于产生高能量密度的激光输出光脉冲的高功率气体放电激光器及其制造方法，其可以包括激光输出光脉冲光束光学轨道，其具有从激光光源到激光系统的顺序排列的多个模块化部件 输出端口并且限定具有单个中心线轴线的激光输出光脉冲光束路径; 在光轨中串联的第一光模块和第二光模块; 柔性接口元件，其位于第一和第二光学模块之间，并刚性地附接到第一和第二光学模块中的每一个; 以及在所述输出激光脉冲光束路径中具有固定位置的光学元件，包括与所述第一光学模块的刚性附件，并且在所述柔性接口元件内延伸。 光学元件可以包括光束扩展器，其可以包括透镜光束扩展器。 光学元件可以包括形成光束扩展器的伸缩透镜组的至少一部分，并且伸缩透镜组的至少一部分包括形成光束扩展器的整个伸缩透镜组或伸缩透镜组的至少一部分 透镜组可以包括光束扩展器的第一部分，其与位于激光输出脉冲光束光轨中的后续光学模块中的至少第二部分沿着相同的光学中心线轴协作。 多个对准机构可将光学元件对准激光输出脉冲光束的第一和第二轴线，第一和第二轴线基本上彼此正交并且与光学中心线轴线正交，并且还沿着光学中心线轴线 。 光束扩展器可以并入作为输出耦合器光学器件的一个光学元件，并且可以具有可移动透镜以实现一定范围的放大率。