公开(公告)号：US06597048B1

公开(公告)日：2003-07-22

申请号：US09828991

申请日：2001-04-10

Applicant: Edwin C. Kan

Inventor： Edwin C. Kan

IPC: H01L2984

CPC classification number: B81B3/0008 ,  B81C1/00976 ,  B81C2201/112 ,  G11C23/00

Abstract: A process and apparatus for injecting electrostatic charges into opposing elements of MEMS structures to produce repulsing forces between the elements. These forces tend to produce controlled spacing between components to prevent sticking and to provide friction-free relative movement.

Abstract translation: 一种用于将静电电荷注入到MEMS结构的相对元件中以在元件之间产生排斥力的工艺和装置。 这些力倾向于在部件之间产生受控的间隔，以防止粘附并提供无摩擦的相对运动。