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公开(公告)号:US20140231933A1
公开(公告)日:2014-08-21
申请号:US14163577
申请日:2014-01-24
Inventor: Young-Jun YU , Hongkyw CHOI , Jin Sik CHOI , Kwang Hyo CHUNG , Jin Tae KIM , Doo Hyeb YOUN , Choon Gi CHOI
IPC: G01N27/414 , H01L29/66
CPC classification number: H01L29/66 , G01N27/128
Abstract: Provided is a gas sensor including a substrate, a sensing electrode extended in a first direction on the substrate, and a plurality of heaters disposed in a second direction crossing the first direction on the substrate. The plurality of heaters is separated at both sides of the sensing electrode. The plurality of heaters includes graphene.
Abstract translation: 提供一种气体传感器,包括基板,在基板上沿第一方向延伸的感测电极以及沿与基板上的第一方向交叉的第二方向设置的多个加热器。 多个加热器在感测电极的两侧分离。 多个加热器包括石墨烯。
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公开(公告)号:US20140103296A1
公开(公告)日:2014-04-17
申请号:US13797703
申请日:2013-03-12
Inventor: Young-Jun YU , Choon Gi Choi
IPC: G01N27/414
CPC classification number: G01N27/414 , B82Y15/00 , B82Y40/00 , G01N27/127
Abstract: Provided is a graphene nanoribbon sensor. The sensor includes a substrate, a graphene layer formed on the substrate in a first direction, and an upper dielectric layer on the graphene layer. Here, the graphene layer may have a plurality of electrode regions respectively separated in the first direction and a channel between the plurality of electrode regions.
Abstract translation: 提供了一种石墨烯纳米纤维传感器。 传感器包括基板,在第一方向上形成在基板上的石墨烯层和石墨烯层上的上介电层。 这里,石墨烯层可以具有分别在第一方向上分离的多个电极区域和多个电极区域之间的沟道。
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