公开(公告)号：US20210249215A1

公开(公告)日：2021-08-12

申请号：US16973497

申请日：2019-06-24

Applicant: Excillum AB

Inventor： Per TAKMAN ,  Ulf LUNDSTRÖM ,  Björn HANSSON

IPC: H01J35/14 ,  H01J35/08 ,  H05G1/30

Abstract: A method in an X-ray source configured to emit, from an interaction region, X-ray radiation generated by an interaction between an electron beam and a target, the method including the steps of: providing the target; providing the electron beam; deflecting the electron beam along a first direction relative the target; detecting electrons indicative of the interaction between the electron beam and the target; determining a first extension of the electron beam on the target, along the first direction, based on the detected electrons and the deflection of the electron beam; detecting X-ray radiation generated by the interaction between the electron beam and the target; and determining a second extension of the electron beam on the target, along a second direction, based on the detected X-ray radiation.

公开(公告)号：US20200058461A1

公开(公告)日：2020-02-20

申请号：US16499582

申请日：2018-03-27

Applicant: Excillum AB

Inventor： Per TAKMAN ,  Tomi TUOHIMAA

IPC: H01J35/08 ,  H05G1/36 ,  H05G1/26 ,  H01J35/16

Abstract: A method for generating X-ray radiation, the method including providing a liquid target in a chamber, directing an electron beam towards the liquid target such that the electron beam interacts with the liquid target to generated X-ray radiation, estimating a number of particles produced from the interaction between the electron beam and the liquid target by measuring a number of positively charged particles in the chamber and eliminating a contribution from scattered electrons to the estimated number of particles, and controlling the electron beam, and/or a temperature in a region of the liquid target in which the electron beam interacts with the target, such that the estimated number of particles is below a predetermined limit. Also, a corresponding X-ray source.