公开(公告)号：US20210249215A1

公开(公告)日：2021-08-12

申请号：US16973497

申请日：2019-06-24

Applicant: Excillum AB

Inventor： Per TAKMAN ,  Ulf LUNDSTRÖM ,  Björn HANSSON

IPC: H01J35/14 ,  H01J35/08 ,  H05G1/30

Abstract: A method in an X-ray source configured to emit, from an interaction region, X-ray radiation generated by an interaction between an electron beam and a target, the method including the steps of: providing the target; providing the electron beam; deflecting the electron beam along a first direction relative the target; detecting electrons indicative of the interaction between the electron beam and the target; determining a first extension of the electron beam on the target, along the first direction, based on the detected electrons and the deflection of the electron beam; detecting X-ray radiation generated by the interaction between the electron beam and the target; and determining a second extension of the electron beam on the target, along a second direction, based on the detected X-ray radiation.