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公开(公告)号：US20230266529A1
公开(公告)日：2023-08-24
申请号：US17679405
申请日：2022-02-24
Applicant: GlobalFoundries U.S. Inc.
Inventor： Hemant Dixit , Yusheng Bian , Theodore Letavic
CPC classification number: G02B6/122 , G02B6/43 , G02B6/0026
Abstract: Structures including an optical component and methods of fabricating a structure including an optical component. The structure includes a waveguide core and a back-end-of-line stack including a first metallization level, a second metallization level, and a heat sink having a metal feature in the second metallization level. The heat sink is positioned adjacent to a section of the waveguide core. The first metallization level including a dielectric layer positioned between the metal feature and the section of the waveguide core.
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