公开(公告)号：US07490552B1

公开(公告)日：2009-02-17

申请号：US11894629

申请日：2007-07-31

Applicant: Daniel Jean ,  Michael Beggans ,  Gerald Laib ,  David Olson

Inventor： Daniel Jean ,  Michael Beggans ,  Gerald Laib ,  David Olson

IPC: F42C15/26

CPC classification number: F42C15/005 ,  F42C15/184 ,  F42C15/22 ,  F42C15/24 ,  F42C15/40

Abstract: A MEMS apparatus having a substrate layer, a device layer and an intermediate oxide layer joining them. A slider is formed in the device layer and includes an enlarged end portion. A walled chamber having a hollow interior in which is positioned a microdetonator is formed in the substrate layer beneath the enlarged end portion and is secured to it by the oxide layer. A drive is operable to move the slider, and with it, the walled chamber, from an initial position to a final position. When in the final position an initiator is operable to initiate the microdetonator.

Abstract translation: 具有衬底层，器件层和连接它们的中间氧化物层的MEMS器件。 滑块形成在装置层中，并包括扩大的端部。 在扩大的端部下方的基底层中形成具有中空内部的具有中空内部的围壁室，并且通过氧化物层固定在其上。 驱动器可操作以将滑块以及与之隔离的腔室从初始位置移动到最终位置。 当处于最终位置时，启动器可操作以启动微型扩散器。