公开(公告)号：US5220263A

公开(公告)日：1993-06-15

申请号：US675482

申请日：1991-03-26

申请人： Masanori Onishi ,  Hidemitsu Tabata ,  Teppei Yamashita ,  Masanao Murata

发明人： Masanori Onishi ,  Hidemitsu Tabata ,  Teppei Yamashita ,  Masanao Murata

IPC分类号： B60K1/04 ,  B25J5/00 ,  B25J9/18 ,  B25J13/00 ,  B25J19/00 ,  B60L11/18 ,  G05B19/418 ,  G05D1/02

CPC分类号： G05B19/41895 ,  G05D1/0225 ,  G05D1/0265 ,  G05D1/0297 ,  G05B2219/31003 ,  G05B2219/31004 ,  G05D1/0274 ,  G05D2201/0216

摘要： A moving robot system, employing a charging control system for robots, is configured by plural moving robots, at least one charging station and a control station. Each moving robot is designed to perform an operation thereof in accordance with programs stored therein under control of the control station. When the power of a charging-type-battery equipped in each moving robot is consumed and lowered to the predetermined level, it automatically moves to its nearest charging station designated by the control station other than the charging station which is used for another moving robot. In this case, the control station controls the moving robots such that plural moving robots are not simultaneously concentrated to one charging station.

摘要翻译： 使用机器人的充电控制系统的移动机器人系统由多个移动机器人，至少一个充电站和控制站构成。 每个移动机器人被设计成在控制台的控制下根据存储在其中的程序执行其操作。 当每个移动机器人中装备的充电电池的功率被消耗并降低到预定水平时，它自动地移动到除了用于另一个移动机器人的充电站之外的控制站指定的最近的充电站。 在这种情况下，控制站控制移动机器人，使得多个移动机器人不能同时集中到一个充电站。

公开(公告)号：US5332013A

公开(公告)日：1994-07-26

申请号：US850668

申请日：1992-03-13

申请人： Masanao Sugita ,  Hitoshi Kawano ,  Teppei Yamashita

发明人： Masanao Sugita ,  Hitoshi Kawano ,  Teppei Yamashita

IPC分类号： H01L21/673 ,  H01L21/677 ,  H05K3/00 ,  B60L11/00

CPC分类号： H01L21/67389 ,  H01L21/67393 ,  H01L21/67724 ,  H01L21/67736

摘要： An unmanned conveying device for a clean room is capable of restraining a spontaneous oxide film from growing in case that an unmanned carriage is obliged to stop for a long time due to its own cause of a cause at a destination spot while it conveys a semiconductor wafer from one spot to the destination spot. It is a first aspect of the invention to provide the unmanned conveying device which is self-propelled for conveying an object from a ground facility to a destination spot while loading an object to be conveyed thereon, characterized in that the object is accommodated in a container and the container is connected to an inert gas reservoir through a gas supply passage so that the atmosphere in the container can be replaced by a nitrogen gas. It is a second aspect of the invention to provide an unmanned conveying device for a clean room provided with a container for accommodating an object to be conveyed therein, the container being connected to an inert gas reservoir through a gas supply passage so that the air in the container can be replaced by a nitrogen gas, characterized in that the unmanned conveying device has a coupler unit mounted thereon and connected to the gas supply passage and the inert gas reserving source is located on the ground and connected to a coupler unit of a coupler device on the ground through a pipe and the gas supply passage is connected to the inert gas reservoir through both coupler unit.

摘要翻译： 用于洁净室的无人输送装置能够抑制自发氧化膜生长，这是因为在传送半导体晶片的过程中由于自身原因造成的原因造成无人驾驶的车辆被长时间停止 从一个地方到目的地。 本发明的第一方面是提供一种自行推进的无人输送装置，用于将物体从地面设备输送到目的地点，同时装载要运送的物体，其特征在于，所述物体容纳在容器 并且容器通过气体供给通道连接到惰性气体储存器，使得容器中的气氛可以用氮气代替。 本发明的第二方面是提供一种用于洁净室的无人输送装置，该清洁室设有用于容纳要输送的物体的容器，该容器通过气体供应通道连接到惰性气体储存器， 容器可以用氮气代替，其特征在于，无人输送装置具有安装在其上的联接器单元并且连接到气体供应通道，惰性气体储存源位于地面上并连接到耦合器的耦合器单元 设备在地面上通过管道，气体供应通道通过两个联接器单元连接到惰性气体储存器。

公开(公告)号：US4982329A

公开(公告)日：1991-01-01

申请号：US210845

申请日：1988-06-24

申请人： Hidemitsu Tabata ,  Teppei Yamashita ,  Masanori Onishi ,  Yuji Nishikawa

发明人： Hidemitsu Tabata ,  Teppei Yamashita ,  Masanori Onishi ,  Yuji Nishikawa

IPC分类号： G05D1/02

CPC分类号： G05D1/0274 ,  G05D1/0255 ,  G05D1/0272 ,  G05D1/0238 ,  G05D1/024 ,  G05D2201/0216

摘要： A self-contained unmanned vehicle (robot car) is designed to be capable of independently traveling, on the basis of previously specified geographic data, to convey parts, finished products, etc. etc. in a factory or similar, and achieves fine travel position control while simultaneously reducing the X memory capacity for the geographic data and ensures easy preparation and entry of geographic data and facilitates the comprehensibility of the contents of the geographic data. The vehicle includes: a first memory for storing the coordinate data of the node located on the traversable travel path; a second memory for storing the geographic data consisting of operation codes indicating the travel path conditions, and a scene command with the main operands denoting the continuous distance of the travel path under these operation codes; a decision-making unit for determining the path to be traversed by establishing the nodes to be traversed by the unmanned vehicle on its approach towards the designated target location; and a travel control section for controlling the travel movement of the unmanned vehicle on the basis of scene commands in accordance with the pre-set sequence in which the predetermined nodes are to be traversed; and, furthermore, a geographic data inputting device for entering the geographic data; and a geographic data display for displaying, during the input operation to enter the georgaphic data with the geographic data input device, line segments whose length corresponds to the value of the main operand, by means of a line type previously set in accordance with the operation code type.