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公开(公告)号：US20090303569A1
公开(公告)日：2009-12-10
申请号：US12124110
申请日：2008-05-20
申请人： Gyoung Il Cho , Jin Young Sohn , Hye Young Kim , Cheong Soo Seo
发明人： Gyoung Il Cho , Jin Young Sohn , Hye Young Kim , Cheong Soo Seo
IPC分类号： G02B26/00
CPC分类号： B81C1/00007 , B81B2201/042 , G02B26/0833
摘要： A self-tilted micromirror device of the present invention comprises a plurality of micro-structures including a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a top plate coupled to the stiction plate elastically and configured to have at least one motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the top plate and configured to provide a tilting point or area for the motion of the top plate. The motion of the top plate is determined by the geometry of the micro-structures of the self-tilted micromirror device.
摘要翻译： 本发明的自倾斜微反射镜装置包括多个微结构，包括基底，至少一个固定板，其被配置为通过粘附力被吸引到基底;弹性地连接到该静摩擦板的顶板， 当所述固定板被吸引到所述基板时的至少一个运动，以及设置在所述基板和所述顶板之间的至少一个枢轴结构，并且构造成为所述顶板的运动提供倾斜点或区域。 顶板的运动由自倾斜微镜装置的微结构的几何形状决定。
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公开(公告)号：US20090290244A1
公开(公告)日：2009-11-26
申请号：US12124111
申请日：2008-05-20
申请人： Gyoung Il Cho , Jin Young Sohn , Hye Young Kim , Cheong Soo Seo
发明人： Gyoung Il Cho , Jin Young Sohn , Hye Young Kim , Cheong Soo Seo
IPC分类号： G02B7/185
CPC分类号： G02B26/0833
摘要： A Micromirror Array Lens with self-tilted micromirrors comprising a plurality of self-tilted micromirrors and configured to form a designed optical surface profile by self-tilted micromirrors. Each self-tilted micromirror comprises a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a micromirror plate having a reflective surface, coupled to the stiction plate elastically and configured to have a required motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the micromirror plate and configured to provide a tilting point or area for the motion of the micromirror plate. The designed optical surface profile determines the required motion of the micromirror plate and a surface profile shape memory is built in the structure of the micro-mechanical elements of the self-tilted micromirrors so that each micromirror plate has the required motion.
摘要翻译： 一种具有自倾斜微镜的微镜阵列透镜，包括多个自倾斜微镜，并且被配置为通过自倾斜微镜形成设计的光学表面轮廓。 每个自倾斜微反射镜包括基底，至少一个固定板被配置成通过粘附力被吸引到基底上，具有反射表面的微镜板，弹性地耦合到该静摩擦板，并被构造成当静电板 被吸引到基板，以及设置在基板和微反射板之间的至少一个枢轴结构，并且构造成提供用于微镜板的运动的倾斜点或区域。 设计的光学表面轮廓确定微镜板的所需运动，并且表面轮廓形状存储器内置在自倾斜微镜的微机械元件的结构中，使得每个微镜板具有所需的运动。
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公开(公告)号：US20080273191A1
公开(公告)日：2008-11-06
申请号：US11743656
申请日：2007-05-02
申请人： Hye Young Kim , Jin Young Sohn , Gyoung Il Cho , Cheong Soo Seo
发明人： Hye Young Kim , Jin Young Sohn , Gyoung Il Cho , Cheong Soo Seo
CPC分类号： G01C3/08 , G01S3/7864 , G01S11/12 , H04N5/2254 , H04N5/232
摘要： The optical tracking device of this invention comprises a lens unit, a control circuitry communicatively coupled to the lens unit, and an imaging unit optically coupled to the lens unit. The lens unit comprises at least one Micromirror Array Lens, wherein the Micromirror Array Lens comprises a plurality of micromirrors and is configured to have a plurality of optical surface profiles by controlling rotations or translations of the micromirrors. The optical tracking device of the invention further comprises an image processing unit, communicatively coupled to the imaging unit, configured to process the image information from the imaging unit and generates a control signal for the control circuit to control the lens unit. The optical tracking device of the present invention provides capability of tracking a target moving in a high speed, providing three-dimensional image information of the object, and compensating the aberration of the optical tracking device.
摘要翻译： 本发明的光学跟踪装置包括透镜单元，通信地耦合到透镜单元的控制电路以及与透镜单元光耦合的成像单元。 透镜单元包括至少一个微镜阵列透镜，其中微镜阵列透镜包括多个微镜，并且通过控制微镜的旋转或平移来配置为具有多个光学表面轮廓。 本发明的光学跟踪装置还包括图像处理单元，通信地耦合到成像单元，被配置为处理来自成像单元的图像信息，并且产生用于控制电路的控制信号以控制透镜单元。 本发明的光学跟踪装置提供跟踪高速移动的目标的能力，提供对象的三维图像信息，并补偿光学跟踪装置的像差。
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14.发明申请公开(公告)号：US20080137173A1
公开(公告)日：2008-06-12
申请号：US11609882
申请日：2006-12-12
申请人： Hye Young Kim , Dong Woo Gim , Jin Young Sohn , Gyoung Il Cho , Cheong Soo Seo
发明人： Hye Young Kim , Dong Woo Gim , Jin Young Sohn , Gyoung Il Cho , Cheong Soo Seo
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G09G3/346 , G09G2310/0221
摘要： This invention provides a discretely controlled micromirror array device comprising a plurality of micromirrors. The discretely controlled micromirror array device forms multiple surface profiles, wherein the rotational and translational motion of each micromirror is discretely controlled by selectively activating different groups of segmented electrodes using a control circuitry. The discretely controlled micromirror array device is compatible with known semiconductor electronics technologies and provides structural stability and efficiency in motion.
摘要翻译： 本发明提供了包括多个微镜的离散控制的微镜阵列器件。 离散控制的微镜阵列器件形成多个表面轮廓，其中每个微反射镜的旋转和平移运动通过使用控制电路选择性地激活不同组的分段电极来离散地控制。 离散控制的微镜阵列器件与已知的半导体电子技术兼容，并提供结构稳定性和运动效率。
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15.发明授权公开(公告)号：US07589885B2
公开(公告)日：2009-09-15
申请号：US11534620
申请日：2006-09-22
申请人： Jin Young Sohn , Gyoung Il Cho , Cheong Soo Seo
发明人： Jin Young Sohn , Gyoung Il Cho , Cheong Soo Seo
CPC分类号： G02B26/0841
摘要： The present invention provides an optical micromirror device and their array device and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the micromirror array device by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.
摘要翻译： 本发明提供了一种光学微镜器件及其阵列器件及其制造方法。 通过引入具有高反射金属层的次涂层和涂层，微镜的反射层被保护免受环境的影响，微机械结构的氧化，降解，酸，碱和电偶腐蚀。 此外，新的涂层结构通过减少金属层的反射率的降低，通过在光学非有效区域中提供抗反射以及通过保护微机械结构来增强微镜阵列器件的性能。
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公开(公告)号：US07619807B2
公开(公告)日：2009-11-17
申请号：US11933105
申请日：2007-10-31
申请人： Sang Hyune Baek , Jin Young Sohn , Gyoung Il Cho , Cheong Soo Seo
发明人： Sang Hyune Baek , Jin Young Sohn , Gyoung Il Cho , Cheong Soo Seo
CPC分类号： G02B5/10 , G02B5/188 , G02B5/1895 , G02B17/002 , G02B26/0833
摘要： A Micromirror Array Lens comprises a plurality of micromirrors arranged on a flat or a curved surface to reflect incident light. Each micromirror in the Micromirror Array Lens is configured to have at least one motion. The Micromirror Array Lens forms at least one optical surface profile reproducing free surfaces by using the motions of the micromirrors. The free surface can be any two or three-dimensional continuous or discrete reflective surface. The Micromirror Array Lens having the corresponding optical surface profile provides optical focusing properties substantially identical to those of the free surface. The Micromirror Array Lens can forms various optical elements such as a variable focal length lens, a fixed focal length lens, an array of optical switches, a beam steerer, a zone plate, a shutter, an iris, a multiple focal length lens, other multi-function optical elements, and so on.
摘要翻译： 微镜阵列透镜包括布置在平坦或弯曲表面上以反射入射光的多个微镜。 微镜阵列镜头中的每个微镜被配置为具有至少一个运动。 微镜阵列透镜通过使用微镜的运动而形成至少一个光学表面轮廓来再现自由表面。 自由表面可以是任何二维或三维连续或离散的反射表面。 具有对应的光学表面轮廓的微镜阵列透镜提供与自由表面基本相同的光学聚焦性质。 微镜阵列透镜可以形成各种光学元件，例如可变焦距透镜，固定焦距透镜，光学开关阵列，光束转向器，区域板，快门，光圈，多焦距透镜，其他 多功能光学元件等。
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公开(公告)号：US07489434B2
公开(公告)日：2009-02-10
申请号：US11743664
申请日：2007-05-02
申请人： Gyoung Il Cho , Jin Young Sohn , Sang Hyune Baek , Cheong Soo Seo
发明人： Gyoung Il Cho , Jin Young Sohn , Sang Hyune Baek , Cheong Soo Seo
CPC分类号： G02B26/0833 , G02B27/0025
摘要： This invention provides a Hybrid Micromirror Array Lens with reduced chromatic aberration over a broadband wavelength range of light. Conventional micromirror array lens uses phase matching condition. Therefore, the optical surface profile of Micromirror Array Lens using the same phase condition has a discontinuous surface profile. As the required optical power of Micromirror Array Lens is increased, the number of profile discontinuity of Micromirror Array Lens is increased. Therefore, the chromatic aberration is increased. To minimize the chromatic aberration, the number of profile discontinuity should be minimized. The number of discontinuity is reduced when the optical surface profile has a simulating base curve, called a translation contour with optical power. Hybrid Micromirror Array Lens is invented to reduce a large translational amount and chromatic aberration for large optical power lens.
摘要翻译： 本发明提供了一种在宽带波长范围内具有降低色差的混合微镜阵列透镜。 传统的微镜阵列透镜使用相位匹配条件。 因此，使用相同相位条件的微镜阵列透镜的光学表面轮廓具有不连续的表面轮廓。 随着微镜阵列镜头的所需光功率的增加，微镜阵列镜头的轮廓不连续性的数量增加。 因此，色差增加。 为了最小化色差，轮廓不连续的数量应该被最小化。 当光学表面轮廓具有模拟的基本曲线（称为具有光焦度的平移轮廓）时，不连续的数量减少。 发明了混合微镜阵列透镜，以减小大的光学功率透镜的大的平移量和色差。
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公开(公告)号：US20080273235A1
公开(公告)日：2008-11-06
申请号：US11743664
申请日：2007-05-02
申请人： Gyoung Il Cho , Jin Young Sohn , Sang Hyune Baek , Cheong Soo Seo
发明人： Gyoung Il Cho , Jin Young Sohn , Sang Hyune Baek , Cheong Soo Seo
IPC分类号： G02B26/00
CPC分类号： G02B26/0833 , G02B27/0025
摘要： This invention provides a Hybrid Micromirror Array Lens with reduced chromatic aberration over a broadband wavelength range of light. Conventional micromirror array lens uses phase matching condition. Therefore, the optical surface profile of Micromirror Array Lens using the same phase condition has a discontinuous surface profile. As the required optical power of Micromirror Array Lens is increased, the number of profile discontinuity of Micromirror Array Lens is increased. Therefore, the chromatic aberration is increased. To minimize the chromatic aberration, the number of profile discontinuity should be minimized. The number of discontinuity is reduced when the optical surface profile has a simulating base curve, called a translation contour with optical power. Hybrid Micromirror Array Lens is invented to reduce a large translational amount and chromatic aberration for large optical power lens.
摘要翻译： 本发明提供了一种在宽带波长范围内具有降低色差的混合微镜阵列透镜。 传统的微镜阵列透镜使用相位匹配条件。 因此，使用相同相位条件的微镜阵列透镜的光学表面轮廓具有不连续的表面轮廓。 随着微镜阵列镜头的所需光功率的增加，微镜阵列镜头的轮廓不连续性的数量增加。 因此，色差增加。 为了最小化色差，轮廓不连续的数量应该被最小化。 当光学表面轮廓具有模拟的基本曲线（称为具有光焦度的平移轮廓）时，不连续的数量减少。 发明了混合微镜阵列透镜，以减小大的光学功率透镜的大的平移量和色差。
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公开(公告)号：US07365899B2
公开(公告)日：2008-04-29
申请号：US11463875
申请日：2006-08-10
申请人： Dong Woo Gim , Gyoung Il Cho , Jin Young Sohn , Cheong Soo Seo
发明人： Dong Woo Gim , Gyoung Il Cho , Jin Young Sohn , Cheong Soo Seo
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B26/085
摘要： The present invention discloses a micromirror device with multi-axis rotational and translational motion. Newly introduced structure of the top electrode plate improves structural stability, flexibility, and more motion efficiency of the micromirror device. The invention also improves controllability of micromirror motion by designing the appropriate flexible structure to generate desired motion. With side-by-side arrangement of the micromirror devices, the micromirror devices are built as an array to form a micromirror array lens.
摘要翻译： 本发明公开了一种具有多轴旋转和平移运动的微镜装置。 顶部电极板的新引入结构提高了微镜装置的结构稳定性，灵活性和更高的运动效率。 本发明还通过设计适当的柔性结构以产生所需运动来提高微镜运动的可控性。 利用微镜器件的并排布置，微镜器件被构建为阵列以形成微镜阵列透镜。
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公开(公告)号：US07777959B2
公开(公告)日：2010-08-17
申请号：US11426565
申请日：2006-06-26
申请人： Jin Young Sohn , Cheong Soo Seo , Gyoung Il Cho
发明人： Jin Young Sohn , Cheong Soo Seo , Gyoung Il Cho
IPC分类号： G02B27/10
CPC分类号： G02B26/0833
摘要： The present invention provides a Micromirror Array Lens (MMAL) with fixed focal length to reproduce a designed surface having optical focusing power. The micro mechanical structures with surface profile shape memory are fabricated and released after fabrication. Each micromirror in the MMAL has its own motion by stiction force and/or electrostatic force while and/or after the releasing process. Once the designed surface is formed, the MMAL has an optical power as a lens.
摘要翻译： 本发明提供一种具有固定焦距的微镜阵列透镜（MMAL），以再现具有光学聚焦能力的设计表面。 具有表面轮廓形状记忆的微机械结构在制造之后被制造和释放。 在释放过程中和/或之后，MMAL中的每个微反射镜都通过静力和/或静电力自身运动。 一旦形成了设计的表面，则MMAL具有作为透镜的光学功率。
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