摘要:
The present invention provides an optical micromirror device and their array device and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the micromirror array device by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.
摘要:
A Micromirror Array Lens with self-tilted micromirrors comprising a plurality of self-tilted micromirrors and configured to form a designed optical surface profile by self-tilted micromirrors. Each self-tilted micromirror comprises a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a micromirror plate having a reflective surface, coupled to the stiction plate elastically and configured to have a required motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the micromirror plate and configured to provide a tilting point or area for the motion of the micromirror plate. The designed optical surface profile determines the required motion of the micromirror plate and a surface profile shape memory is built in the structure of the micro-mechanical elements of the self-tilted micromirrors so that each micromirror plate has the required motion.
摘要:
The binoculars of the present invention comprise two optical units; one optical unit for each eye. Each optical unit comprises a first reflective lens element and a second reflective lens element, wherein at least one of the reflective lens elements is a Micromirror Array Lens. The binoculars of the present invention provide focusing and/or zoom functions without or with minimal macroscopic mechanical lens movement.
摘要:
This invention provides a discretely controlled micromirror array device comprising a plurality of micromirrors. The discretely controlled micromirror array device forms multiple surface profiles, wherein the rotational and translational motion of each micromirror is discretely controlled by selectively activating different groups of segmented electrodes using a control circuitry. The discretely controlled micromirror array device is compatible with known semiconductor electronics technologies and provides structural stability and efficiency in motion.
摘要:
The optical tracking device of this invention comprises a lens unit, a control circuitry communicatively coupled to the lens unit, and an imaging unit optically coupled to the lens unit. The lens unit comprises at least one Micromirror Array Lens, wherein the Micromirror Array Lens comprises a plurality of micromirrors and is configured to have a plurality of optical surface profiles by controlling rotations or translations of the micromirrors. The optical tracking device of the invention further comprises an image processing unit, communicatively coupled to the imaging unit, configured to process the image information from the imaging unit and generates a control signal for the control circuit to control the lens unit. The optical tracking device of the present invention provides capability of tracking a target moving in a high speed, providing three-dimensional image information of the object, and compensating the aberration of the optical tracking device.
摘要:
The binoculars of the present invention comprise two optical units; one optical unit for each eye. Each optical unit comprises a first reflector element and a second reflector element, wherein at least one of the reflector elements is a micromirror array reflector. The binoculars of the present invention provide focusing and/or zoom functions without or with minimal macroscopic mechanical lens movement.
摘要:
A Micromirror Array Lens comprises a plurality of micromirrors arranged on a flat or a curved surface to reflect incident light. Each micromirror in the Micromirror Array Lens is configured to have at least one motion. The Micromirror Array Lens forms at least one optical surface profile reproducing free surfaces by using the motions of the micromirrors. The free surface can be any two or three-dimensional continuous or discrete reflective surface. The Micromirror Array Lens having the corresponding optical surface profile provides optical focusing properties substantially identical to those of the free surface. The Micromirror Array Lens can forms various optical elements such as a variable focal length lens, a fixed focal length lens, an array of optical switches, a beam steerer, a zone plate, a shutter, an iris, a multiple focal length lens, other multi-function optical elements, and so on.
摘要:
The present invention provides a micromirror array with iris function that comprises a plurality of micromirrors and is configured to provide an adjustable aperture having a plurality of aperture sizes by controlling motions of the micromirrors. The adjustable aperture controls the amount of incident light admitted to an image sensor by changing the aperture size. Also, the micromirrors comprised in the aperture forms a Micromirror Array Lens having variable focusing function.
摘要:
A discretely controlled micromirror device provides multiple motions of a micromirror using stepper plate and micromirror bottom support. The discretely controlled micromirror device can be controlled in a low driving voltage. Also, simple motion control is applied by digital controlling and only single voltage is needed for driving the micromirror motion.
摘要:
This invention provides a Hybrid Micromirror Array Lens with reduced chromatic aberration over a broadband wavelength range of light. Conventional micromirror array lens uses phase matching condition. Therefore, the optical surface profile of Micromirror Array Lens using the same phase condition has a discontinuous surface profile. As the required optical power of Micromirror Array Lens is increased, the number of profile discontinuity of Micromirror Array Lens is increased. Therefore, the chromatic aberration is increased. To minimize the chromatic aberration, the number of profile discontinuity should be minimized. The number of discontinuity is reduced when the optical surface profile has a simulating base curve, called a translation contour with optical power. Hybrid Micromirror Array Lens is invented to reduce a large translational amount and chromatic aberration for large optical power lens.