-
11.
公开(公告)号:US20240088037A1
公开(公告)日:2024-03-14
申请号:US17931767
申请日:2022-09-13
Applicant: International Business Machines Corporation
Inventor: Brent A. Anderson , Nicholas Anthony Lanzillo , Ruilong Xie , Lawrence A. Clevenger , Albert M. Chu , Nicholas Alexander POLOMOFF
IPC: H01L23/528 , H01L21/768 , H01L23/532
CPC classification number: H01L23/5286 , H01L21/76877 , H01L23/5283 , H01L23/53228
Abstract: A semiconductor device that includes a first via connecting a backside of the semiconductor device to a frontside of the semiconductor device, and a second via connecting the backside of the semiconductor device to the frontside of the semiconductor device. The first via and the second via are directly connected to at least one different wiring level on the frontside or the backside.