公开(公告)号：US20050156530A1

公开(公告)日：2005-07-21

申请号：US11043207

申请日：2005-01-26

申请人： Yong-Kwan Lee ,  Won-Bong Jung ,  Sang-Won Lee ,  Sae-Hoon Uhm ,  Dong-Seok Lee

发明人： Yong-Kwan Lee ,  Won-Bong Jung ,  Sang-Won Lee ,  Sae-Hoon Uhm ,  Dong-Seok Lee

IPC分类号： H01J7/24 ,  H01J37/32 ,  H01L21/3065 ,  H05H1/24 ,  H05H1/46

CPC分类号： H01J37/321 ,  H05H1/46

摘要： An inductively coupled plasma generator having a lower aspect ratio reaction gas, comprising a chamber having a gas inlet through which a reaction gas is supplied, a vacuum pump for maintaining the inside of the chamber vacuum and a gas outlet for exhausting the reaction gas after completion of the reaction, a chuck for mounting a target material to be processed inside the chamber, and an antenna to which high-frequency power is applied, the antenna provided at the upper and lateral portions of the chamber, wherein the antenna has parallel antenna elements in which a discharge of a high frequency can be allowed and impedance is low to ensure a low electron temperature, the antenna is disposed such that a powered end of each of the antenna elements and a ground end of each of the antenna elements opposite to the powered end are symmetrical in view of the center of an imaginary circle formed by the antenna to establish rotation symmetry of plasma density profiles, the antenna elements are twisted in a helical manner, and the powered end of each of the antenna elements is positioned to be far from the chamber and the ground end of each of the antenna elements is positioned to be close to the chamber, thereby compensating for a drop in the plasma density due to ion loss occurring at the powered end.

摘要翻译： 一种具有较低纵横比的反应气体的电感耦合等离子体发生器，包括具有供应反应气体的气体入口的腔室，用于维持腔室真空内部的真空泵和用于在完成后排出反应气体的气体出口 的反应，用于在室内安装待处理的目标材料的卡盘以及设置在室的上部和外侧部分处的高频电力的天线，其中天线具有平行的天线元件 其中可以允许高频放电并且阻抗低以确保低电子温度，天线被布置成使得每个天线元件的动力端和每个天线元件的接地端与 鉴于由天线形成的假想圆的中心，以建立等离子体密度分布的旋转对称性，动力端对称，天线元件ar e以螺旋方式扭曲，并且每个天线元件的动力端定位成远离腔室，并且每个天线元件的接地端被定位成靠近腔室，从而补偿了下降 由于在动力端发生离子损失引起的等离子体密度。