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公开(公告)号：US07088047B2
公开(公告)日：2006-08-08
申请号：US11043207
申请日：2005-01-26
申请人： Yong-Kwan Lee , Won-Bong Jung , Sang-Won Lee , Sae-Hoon Uhm , Dong-Seok Lee
发明人： Yong-Kwan Lee , Won-Bong Jung , Sang-Won Lee , Sae-Hoon Uhm , Dong-Seok Lee
CPC分类号： H01J37/321 , H05H1/46
摘要： An inductively coupled plasma generator having a lower aspect ratio reaction gas, comprising a chamber having a gas inlet through which a reaction gas is supplied, a vacuum pump for maintaining the inside of the chamber vacuum and a gas outlet for exhausting the reaction gas after completion of the reaction, a chuck for mounting a target material to be processed inside the chamber, and an antenna to which high-frequency power is applied, the antenna provided at the upper and lateral portions of the chamber, wherein the antenna has parallel antenna elements in which a discharge of a high frequency can be allowed and impedance is low to ensure a low electron temperature, the antenna is disposed such that a powered end of each of the antenna elements and a ground end of each of the antenna elements opposite to the powered end are symmetrical in view of the center of an imaginary circle formed by the antenna to establish rotation symmetry of plasma density profiles, the antenna elements are twisted in a helical manner, and the powered end of each of the antenna elements is positioned to be far from the chamber and the ground end of each of the antenna elements is positioned to be close to the chamber, thereby compensating for a drop in the plasma density due to ion loss occurring at the powered end.
摘要翻译： 一种具有较低纵横比的反应气体的电感耦合等离子体发生器，包括具有供应反应气体的气体入口的室，用于维持室内真空的真空泵和用于在完成后排出反应气体的气体出口 的反应，用于在室内安装待处理的目标材料的卡盘以及设置在室的上部和外侧部分处的高频电力的天线，其中天线具有平行的天线元件 其中可以允许高频放电并且阻抗低以确保低电子温度，天线被布置成使得每个天线元件的动力端和每个天线元件的接地端与 鉴于由天线形成的假想圆的中心，以建立等离子体密度分布的旋转对称性，动力端对称，天线元件ar e以螺旋方式扭绞，并且每个天线元件的动力端定位成远离腔室，并且每个天线元件的接地端被定位成靠近腔室，从而补偿了下降 由于在动力端发生离子损失引起的等离子体密度。
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公开(公告)号：US20050156530A1
公开(公告)日：2005-07-21
申请号：US11043207
申请日：2005-01-26
申请人： Yong-Kwan Lee , Won-Bong Jung , Sang-Won Lee , Sae-Hoon Uhm , Dong-Seok Lee
发明人： Yong-Kwan Lee , Won-Bong Jung , Sang-Won Lee , Sae-Hoon Uhm , Dong-Seok Lee
IPC分类号： H01J7/24 , H01J37/32 , H01L21/3065 , H05H1/24 , H05H1/46
CPC分类号： H01J37/321 , H05H1/46
摘要： An inductively coupled plasma generator having a lower aspect ratio reaction gas, comprising a chamber having a gas inlet through which a reaction gas is supplied, a vacuum pump for maintaining the inside of the chamber vacuum and a gas outlet for exhausting the reaction gas after completion of the reaction, a chuck for mounting a target material to be processed inside the chamber, and an antenna to which high-frequency power is applied, the antenna provided at the upper and lateral portions of the chamber, wherein the antenna has parallel antenna elements in which a discharge of a high frequency can be allowed and impedance is low to ensure a low electron temperature, the antenna is disposed such that a powered end of each of the antenna elements and a ground end of each of the antenna elements opposite to the powered end are symmetrical in view of the center of an imaginary circle formed by the antenna to establish rotation symmetry of plasma density profiles, the antenna elements are twisted in a helical manner, and the powered end of each of the antenna elements is positioned to be far from the chamber and the ground end of each of the antenna elements is positioned to be close to the chamber, thereby compensating for a drop in the plasma density due to ion loss occurring at the powered end.
摘要翻译： 一种具有较低纵横比的反应气体的电感耦合等离子体发生器，包括具有供应反应气体的气体入口的腔室，用于维持腔室真空内部的真空泵和用于在完成后排出反应气体的气体出口 的反应，用于在室内安装待处理的目标材料的卡盘以及设置在室的上部和外侧部分处的高频电力的天线，其中天线具有平行的天线元件 其中可以允许高频放电并且阻抗低以确保低电子温度，天线被布置成使得每个天线元件的动力端和每个天线元件的接地端与 鉴于由天线形成的假想圆的中心，以建立等离子体密度分布的旋转对称性，动力端对称，天线元件ar e以螺旋方式扭曲，并且每个天线元件的动力端定位成远离腔室，并且每个天线元件的接地端被定位成靠近腔室，从而补偿了下降 由于在动力端发生离子损失引起的等离子体密度。
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公开(公告)号：US08035056B2
公开(公告)日：2011-10-11
申请号：US12111903
申请日：2008-04-29
申请人： Gi-Chung Kwon , Sang-Won Lee , Sae-Hoon Uhm , Jae-Hyun Kim , Bo-Han Hong , Yong-Kwan Lee
发明人： Gi-Chung Kwon , Sang-Won Lee , Sae-Hoon Uhm , Jae-Hyun Kim , Bo-Han Hong , Yong-Kwan Lee
IPC分类号： B23K10/00
CPC分类号： H01J37/32935 , H01J37/321 , H05H1/46
摘要： A plasma generation apparatus includes: a chamber having a chamber lid and defining an airtight reaction region; a susceptor in the chamber; a gas supply means supplying a process gas to the chamber; and a toroidal core vertically disposed with respect to the susceptor through the chamber lid, comprising: a toroidal ferromagnetic core combined with the chamber, the toroidal ferromagnetic core having a first portion outside the chamber and a second portion inside the chamber, the second portion having an opening portion; a radio frequency (RF) power supply connected to the chamber; an induction coil electrically connected to the RF power supply, the induction coil rolling the first portion; and a matching circuit matching an impedance between the RF power supply and the induction coil.
摘要翻译： 等离子体产生装置包括：具有室盖并限定气密反应区域的室; 室内的一个感受器; 向处理室供给处理气体的气体供给装置; 以及相对于所述基座通过所述室盖垂直设置的环形芯，包括：与所述室结合的环形铁磁芯，所述环形铁磁芯具有在所述室外部的第一部分和所述室内的第二部分，所述第二部分具有 开口部; 连接到所述室的射频（RF）电源; 感应线圈，其电连接到所述RF电源，所述感应线圈滚动所述第一部分; 以及与RF电源和感应线圈之间的阻抗匹配的匹配电路。
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公开(公告)号：US07411148B2
公开(公告)日：2008-08-12
申请号：US11356947
申请日：2006-02-16
申请人： Gi-Chung Kwon , Sang-Won Lee , Sae-Hoon Uhm , Jae-Hyun Kim , Bo-Han Hong , Yong-Kwan Lee
发明人： Gi-Chung Kwon , Sang-Won Lee , Sae-Hoon Uhm , Jae-Hyun Kim , Bo-Han Hong , Yong-Kwan Lee
CPC分类号： H01J37/32935 , H01J37/321 , H05H1/46
摘要： A plasma generation apparatus includes: a chamber having a chamber lid and defining an airtight reaction region; a susceptor in the chamber; a gas supplier supplying a process gas to the chamber; and a toroidal core vertically disposed with respect to the susceptor through the chamber lid, including: a toroidal ferromagnetic core combined with the chamber, the toroidal ferromagnetic core having a first portion outside the chamber and a second portion inside the chamber, the second portion having an opening portion; a radio frequency (RF) power supply connected to the chamber; an induction coil electrically connected to the RF power supply, the induction coil rolling the first portion; and a matching circuit matching an impedance between the RF power supply and the induction coil.
摘要翻译： 等离子体产生装置包括：具有室盖并限定气密反应区域的室; 室内的一个感受器; 供应处理气体的气体供应器; 以及相对于所述基座通过所述室盖垂直设置的环形芯，包括：与所述室结合的环形铁磁芯，所述环形铁磁芯具有在所述室外部的第一部分和所述室内的第二部分，所述第二部分具有 开口部; 连接到所述室的射频（RF）电源; 感应线圈，其电连接到所述RF电源，所述感应线圈滚动所述第一部分; 以及与RF电源和感应线圈之间的阻抗匹配的匹配电路。
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公开(公告)号：US20060191880A1
公开(公告)日：2006-08-31
申请号：US11356947
申请日：2006-02-16
申请人： Gi-Chung Kwon , Sang-Won Lee , Sae-Hoon Uhm , Jae-Hyun Kim , Bo-Han Hong , Yong-Kwan Lee
发明人： Gi-Chung Kwon , Sang-Won Lee , Sae-Hoon Uhm , Jae-Hyun Kim , Bo-Han Hong , Yong-Kwan Lee
CPC分类号： H01J37/32935 , H01J37/321 , H05H1/46
摘要： A plasma generation apparatus includes: a chamber having a chamber lid and defining an airtight reaction region; a susceptor in the chamber; a gas supply means supplying a process gas to the chamber; and a toroidal core vertically disposed with respect to the susceptor through the chamber lid, comprising: a toroidal ferromagnetic core combined with the chamber, the toroidal ferromagnetic core having a first portion outside the chamber and a second portion inside the chamber, the second portion having an opening portion; a radio frequency (RF) power supply connected to the chamber; an induction coil electrically connected to the RF power supply, the induction coil rolling the first portion; and a matching circuit matching an impedance between the RF power supply and the induction coil.
摘要翻译： 等离子体产生装置包括：具有室盖并限定气密反应区域的室; 室内的一个感受器; 向处理室供给处理气体的气体供给装置; 以及相对于所述基座通过所述室盖垂直设置的环形芯，包括：与所述室结合的环形铁磁芯，所述环形铁磁芯具有在所述室外部的第一部分和所述室内的第二部分，所述第二部分具有 开口部; 连接到所述室的射频（RF）电源; 感应线圈，其电连接到所述RF电源，所述感应线圈滚动所述第一部分; 以及与RF电源和感应线圈之间的阻抗匹配的匹配电路。
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公开(公告)号：US07079085B2
公开(公告)日：2006-07-18
申请号：US10766665
申请日：2004-01-27
申请人： Young-Kwan Lee , Sang-Won Lee , Sae-Hoon Uhm
发明人： Young-Kwan Lee , Sang-Won Lee , Sae-Hoon Uhm
CPC分类号： H01J37/321 , H05H1/46
摘要： An antenna structure for an inductively coupled plasma generator suitable for processing large-diameter wafers or large, flat-panel display devices by making a plasma density distribution uniform and symmetrical with respect to a rotating direction inside a circular or rectangular chamber in which a wafer is processed. In the antenna structure having a powered end to which RF power is applied and a ground end connected to the ground, at least two loop antenna elements are disposed electrically in parallel with each other, the powered ends and ground ends of the respective antennas are disposed symmetrically with respect to the center of the antennas, and the antennas crossing each other such that the powered ends and ground ends thereof are disposed at a part far from a chamber and central parts thereof are disposed at a part close to the chamber.
摘要翻译： 一种用于电感耦合等离子体发生器的天线结构，其适用于通过使等离子体密度分布在圆形或矩形室内相对于旋转方向均匀且对称的方式处理大直径晶片或大型平板显示装置，其中晶片为 处理。 在具有施加RF功率的动力端和连接到地面的接地端的天线结构中，至少两个环形天线元件彼此并联设置，各个天线的动力端和接地端被布置 相对于天线的中心对称，并且天线彼此交叉，使得其动力端和接地端设置在远离室的一部分处，并且其中心部分设置在靠近室的部分。
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公开(公告)号：US09010733B2
公开(公告)日：2015-04-21
申请号：US13702867
申请日：2012-01-31
申请人： O-Hung Kwon , Dae-Hee Won , Sang-Won Lee , Kwan-Young Joung , Dong-Wook Lee
发明人： O-Hung Kwon , Dae-Hee Won , Sang-Won Lee , Kwan-Young Joung , Dong-Wook Lee
CPC分类号： B66D1/48 , B66C15/045 , B66C21/00 , B66D1/485 , B66D1/54
摘要： A three dimensional wire flying system includes a plurality of winches collectively hanging an object and a control unit for controlling the plurality of winches and the main safety device. Each of the plurality of winches includes a drum unit, a wire wound on the drum unit, a motor unit which provides power to the drum unit, a brake module which stops rotation of the drum unit, a limit switch which operates upon detecting a hardware limit state, and a servo-system. Each of the plurality of winches operates to move the object in a three dimensional space in three directions, including an up-down direction, a left-right direction and a forward-backward direction, and each winch provides a multi-level safety protection.
摘要翻译： 三维线飞行系统包括多个共同悬挂物体的绞盘和用于控制多个绞盘和主安全装置的控制单元。 多个绞盘中的每一个包括鼓单元，缠绕在鼓单元上的线，向鼓单元提供电力的马达单元，停止滚筒单元旋转的制动模块，限制开关，其在检测到硬件时工作 极限状态和伺服系统。 多个绞盘中的每一个操作用于在包括上下方向，左右方向和前后方向的三个方向上的三维空间中移动物体，并且每个绞盘提供多级安全保护。
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公开(公告)号：US08847871B2
公开(公告)日：2014-09-30
申请号：US12420551
申请日：2009-04-08
申请人： Hyoung-Rae Lee , Jae-Ho Jung , Sang-Won Lee , Duk-Hwan Kang , Tae-Gwang Jung , Ri-Na You
发明人： Hyoung-Rae Lee , Jae-Ho Jung , Sang-Won Lee , Duk-Hwan Kang , Tae-Gwang Jung , Ri-Na You
CPC分类号： G09G3/2096 , G09G3/3677 , G09G3/3688 , G09G2330/021
摘要： A timing control apparatus includes a memory part, a multi-timing control part, and a power supply part. The memory part stores data. The multi-timing control part includes a plurality of timing controllers that sequentially read the stored data from the memory part in response to a reset signal, and outputs a power control signal that controls an output timing of a power. The power supply part outputs the power in response to the power control signal.
摘要翻译： 定时控制装置包括存储部分，多时序控制部分和电源部分。 存储器部分存储数据。 多时间控制部分包括多个定时控制器，其响应于复位信号顺序地从存储器部分读取存储的数据，并且输出控制电源的输出定时的功率控制信号。 电源部分根据功率控制信号输出电源。
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9.发明申请Apparatus For Testing Loss-Of-Coolant Accident Using Model Of Nuclear Containment Building 审中-公开用于通过核遏制建筑模型测试冷却剂损失事故的装置公开(公告)号：US20130235965A1
公开(公告)日：2013-09-12
申请号：US13495343
申请日：2012-06-13
申请人： Byung-Chul Lee , Chan-Kuk Moon , Hyeong-Taek Kim , Sang-Won Lee , Yu-Jeong Choi , Tae-Hyeop Hong
发明人： Byung-Chul Lee , Chan-Kuk Moon , Hyeong-Taek Kim , Sang-Won Lee , Yu-Jeong Choi , Tae-Hyeop Hong
IPC分类号： G21C17/00
CPC分类号： G21C17/001
摘要： Provided is an apparatus for testing a loss-of-coolant accident using a model of a nuclear containment building, including a containment vessel of which an upper surface is opened and side and lower surfaces are transparent; an internal structure which is disposed in the containment vessel; a hose pipe which is disposed at an upper side of the containment vessel; and a measuring device which is disposed at the lower surface of the containment vessel so as to monitor movement of fluid and debris in the containment vessel.
摘要翻译： 提供了一种使用核容纳建筑物的模型来测试冷却剂损失事故的装置，包括上表面打开并且侧表面和下表面是透明的容纳容器; 设置在安全壳内的内部结构; 软管，其设置在所述安全壳的上侧; 以及设置在安全壳的下表面处以监测容纳容器中的流体和碎屑的运动的测量装置。
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10.发明授权Apparatus for driving a display panel with compensation for heat caused by proximity to light source, and method thereof 有权用于驱动显示面板的装置，用于补偿靠近光源的热量及其方法公开(公告)号：US08502840B2
公开(公告)日：2013-08-06
申请号：US12856108
申请日：2010-08-13
申请人： Hyoung-Rae Lee , Gyu-Su Lee , Min-Sik Um , Sang-Won Lee , Duk-Hwan Kang
发明人： Hyoung-Rae Lee , Gyu-Su Lee , Min-Sik Um , Sang-Won Lee , Duk-Hwan Kang
CPC分类号： G09G5/06 , G09G3/2011 , G09G3/3406 , G09G2320/0233 , G09G2320/0285 , G09G2320/041
摘要： A driving unit of a display panel includes a control part, a gate driving part, a grayscale compensating part, and a data driving part. The control part provides a control signal and a grayscale signal. The gate driving part provides a gate signal to the display panel. The display panel is divided into a plurality of blocks according to a distance from a light source to each of the blocks. The grayscale compensating part outputs a compensating signal of an n-th frame using look-up tables, and the look-up tables respectively correspond to the blocks of the display panel. The data driving part converts the compensating signal of the n-th frame into a grayscale voltage and provides the grayscale voltage to the display panel. Accordingly, the driving unit of the display panel may improve a response speed of liquid crystals and display quality.
摘要翻译： 显示面板的驱动单元包括控制部分，门驱动部分，灰度补偿部分和数据驱动部分。 控制部分提供控制信号和灰阶信号。 门驱动部分向显示面板提供门信号。 根据从光源到每个块的距离，显示面板被分成多个块。 灰度补偿部分使用查找表输出第n帧的补偿信号，并且查找表分别对应于显示面板的块。 数据驱动部将第n帧的补偿信号转换为灰阶电压，并将灰度电压提供给显示面板。 因此，显示面板的驱动单元可以提高液晶的响应速度和显示质量。
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