公开(公告)号：US07047814B2

公开(公告)日：2006-05-23

申请号：US10198304

申请日：2002-07-17

申请人： Art Zias ,  Phil Mauger ,  Sean Cahill ,  Norm Nystrom ,  Albert K. Henning

发明人： Art Zias ,  Phil Mauger ,  Sean Cahill ,  Norm Nystrom ,  Albert K. Henning

IPC分类号： G01L9/12

CPC分类号： G01L1/148 ,  G01L9/0073

摘要： A force or pressure transducer is disclosed. In one embodiment, the transducer has a substrate, a dielectric material disposed on the substrate, a spacing member disposed on the dielectric material, and a resilient element disposed on the dielectric material and the spacing member. A portion of the resilient element is separated from the dielectric material, and a portion of the resilient element is in contact with the dielectric material. The contact area between the resilient element and the dielectric material varies in response to movement of the resilient element. Changes in the contact area alter the capacitance of the transducer, which can be measured by circuit means.