公开(公告)号：US20100223805A1

公开(公告)日：2010-09-09

申请号：US12718008

申请日：2010-03-05

申请人： Hironobu HYAKUTAKE ,  Hideki NISHIMURA ,  Hiroshi TANAKA

发明人： Hironobu HYAKUTAKE ,  Hideki NISHIMURA ,  Hiroshi TANAKA

IPC分类号： F26B21/06

CPC分类号： H01L21/67028 ,  H01L21/67034 ,  H01L21/67769

摘要： Disclosed is a substrate processing device, in which for a filtration material to remove particles contained in a gas used for a drying process, the accretion attached on the filtration material can be removed in a state where the filtration material is disposed on a flow path through which gas flows. The disclosed substrate processing device performs a drying process on a substrate by generating a drying gas from a drying gas generating unit, removing particles in the drying gas by having the drying gas flow through a filtration material, and contacting the gas with the substrate with a liquid remaining thereon in a processing unit. A filtration material heating part heats the filtration material up to a first temperature during the drying process in order to maintain the drying gas at a temperature higher than a dew point temperature of the drying gas, and heats the filtration material up to a second temperature higher than the first temperature during a recycling process of the filtration material in order to evaporate and remove accretion attached on the filtration material.

摘要翻译： 公开了一种基板处理装置，其中，对于用于除去用于干燥过程的气体中所含的颗粒的过滤材料，可以在过滤材料设置在流动路径上的过程中去除附着在过滤材料上的沉积物 哪种气体流动。 所公开的基板处理装置通过从干燥气体发生单元产生干燥气体，在基板上进行干燥处理，通过使干燥气体流过过滤材料除去干燥气体中的微粒，并使气体与基板接触 液体残留在处理单元中。 过滤材料加热部分在干燥过程中将过滤材料加热至第一温度，以将干燥气体保持在高于干燥气体露点温度的温度，并将过滤材料加热至第二温度 比过滤材料回收过程中的第一个温度要蒸发并除去附着在过滤材料上的附着物。

公开(公告)号：US20100168526A1

公开(公告)日：2010-07-01

申请号：US12719507

申请日：2010-03-08

申请人： Hideki NISHIMURA ,  Masayuki KUBO

发明人： Hideki NISHIMURA ,  Masayuki KUBO

IPC分类号： A61B5/00 ,  H04R1/02

CPC分类号： A61B5/14532 ,  A61B2560/0406 ,  A61B2560/0431 ,  H05K5/0243

摘要： In a medical device that measures a condition of a living body, a recess is formed on the exterior (first and second surfaces) of its casing. An attachment member is attached to the inside of the recess. In the case where a display screen that displays a measurement result is provided on the casing, it is preferable that the first and second surfaces are adjacent to a third surface on which the display screen is provided. Preferably, the attachment member includes an adhesive material layer, a print layer, and an anti-slip layer that is formed of at least one of a resin material and a rubber material, and the adhesive material layer, the print layer, and the anti-slip layer are stacked in sequence.

摘要翻译： 在测量活体状态的医疗装置中，在其外壳（第一和第二表面）上形成凹部。 附接构件附接到凹部的内部。 在壳体上设置显示测定结果的显示画面的情况下，优选的是，第一表面和第二表面与设置显示画面的第三表面相邻。 优选地，附着构件包括由树脂材料和橡胶材料中的至少一种形成的粘合材料层，印刷层和防滑层，以及粘合材料层，印刷层和抗反射层 滑动层依次层叠。