公开(公告)号：US20200343404A1

公开(公告)日：2020-10-29

申请号：US16333252

申请日：2017-11-01

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Doh Kwon LEE ,  In Ho Kim ,  Won Mok Kim ,  Jong Keuk Park ,  Taek Sung Lee ,  Doo Seok Jeong ,  Hyeon Seung Lee ,  Jeung Hyun Jeong

IPC: H01L31/18 ,  B81C1/00 ,  H01L31/054 ,  H01L31/0236

Abstract: An embodiment includes a method of texturing a semiconductor substrate, a semiconductor substrate manufactured using the method, and a solar cell including the semiconductor substrate, the method including: forming metal nanoparticles on a semiconductor substrate, primarily etching the semiconductor substrate, removing the metal nanoparticles, and secondarily etching the primarily etched semiconductor substrate to form nanostructures.