公开(公告)号：US10295337B2

公开(公告)日：2019-05-21

申请号：US15433234

申请日：2017-02-15

Applicant: MITUTOYO CORPORATION

Inventor： Sadayuki Matsumiya ,  Shuichi Kamiyama ,  Hidemitsu Asano ,  Hiroshi Sakai ,  Hiromu Maie ,  Yoshihiko Takahashi ,  Masanori Arai ,  Ken Motohashi

IPC: G01B5/00 ,  G01B5/06 ,  G01B5/12 ,  G01B11/06 ,  G01B11/12 ,  G01B11/24 ,  G01B11/30

Abstract: A surface texture measuring apparatus includes an X axis displacement mechanism and a Y axis displacement mechanism displacing a measurable object having an interior wall along an XY plane; a measurement sensor measuring a surface texture of the interior wall without contact; a Z axis displacement mechanism displacing the measurement sensor in a Z axis direction orthogonal to the XY plane and bringing the measurement sensor to face the interior wall; a W axis displacement mechanism displacing the measurement sensor facing the interior wall in a normal direction of the interior wall; and a θ axis displacement mechanism displacing the measurement sensor facing the interior wall along the interior wall.

公开(公告)号：US10190996B2

公开(公告)日：2019-01-29

申请号：US15093134

申请日：2016-04-07

Applicant: MITUTOYO CORPORATION

Inventor： Sadayuki Matsumiya ,  Hidemitsu Asano ,  Masato Kon

IPC: B65G47/244 ,  G01N23/046

Abstract: An XY shift mechanism can shift a rotary table in a two-dimensional direction (XY direction) orthogonal to a rotation axis of the rotary table. By collaborative control of the shift position of the rotary table in the two-dimensional direction in synchronization with the rotation of the rotary table, rotation is made possible about a virtual rotation center that is set at an arbitrary position on the rotary table. The collaborative control of the shift position of the rotary table in the two-dimensional direction also corrects rotation eccentricity owing to the eccentricity of the rotary table. Thus, the virtual rotation center can be set at an arbitrary position on the rotary table, thus enabling obtainment of high resolution tomographic images of a plurality of regions of interest of an object, without the need for repositioning of the object.