公开(公告)号：US20130258307A1

公开(公告)日：2013-10-03

申请号：US13769308

申请日：2013-02-16

Applicant: NIKON CORPORATION

Inventor： Chetan Mahadeswaraswamy ,  Michael B. Binnard ,  Shigeru Morimoto

IPC: G03F7/20 ,  H02K41/03

CPC classification number: G03F7/70716 ,  G03F7/70758 ,  H02K41/031 ,  H02K2201/18

Abstract: According to one aspect, a stage apparatus includes a first surface, a second surface, an overall magnet array, and a plurality of coils. The overall magnet array is mounted on the first surface, and includes an X magnet array and a Y magnet array. The coils are mounted on the second surface, and include a first coil that cooperates with the X magnet array to control force on the first surface along an x-axis. The coils also include a second coil that cooperates with the Y magnet array to control force on the first surface along a y-axis. The second coil cooperates with the overall magnet array to control force applied to the first surface in a direction normal to the first surface. The first coil does not cooperate with the overall magnet array to control the force applied in the direction normal to the first surface.

Abstract translation: 根据一个方面，舞台装置包括第一表面，第二表面，整体磁体阵列和多个线圈。 整个磁体阵列安装在第一表面上，并且包括X磁体阵列和Y磁体阵列。 线圈安装在第二表面上，并且包括与X磁体阵列配合以控制沿着x轴的第一表面上的力的第一线圈。 线圈还包括与Y磁体阵列配合以控制沿着y轴的第一表面上的力的第二线圈。 第二线圈与整个磁体阵列配合，以便在垂直于第一表面的方向上控制施加到第一表面的力。 第一线圈不与整体磁体阵列配合，以控制沿垂直于第一表面的方向施加的力。