公开(公告)号：US20150146176A1

公开(公告)日：2015-05-28

申请号：US14357296

申请日：2012-11-06

Applicant: NIKON CORPORATION

Inventor： Michel Pharand ,  Chetan Mahadeswaraswamy ,  Michael B. Binnard

IPC: G03F7/20

CPC classification number: G03F7/70716 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00873 ,  G03F7/70758 ,  G03F7/70858 ,  G03F7/70875 ,  H01L21/682

Abstract: A stage assembly (10) that includes (i) a stage (14) that retains a device (26); (ii) a reaction assembly (18) that is spaced apart from the stage (14); (iii) a stage mover (16) that moves the stage (14), the stage mover (16) including a magnet array (38) that is coupled to the stage (14) and a conductor array (36) that is coupled to the reaction assembly (18); (iv) a temperature adjuster (20); and (v) a control system (22) that selectively controls the temperature adjuster (20). The conductor array (36) includes a set of first zone conductor units (250), and a set of second zone conductor units (252). The temperature adjuster (20) independently adjusts the temperature of the set of first zone conductor units (250), and the set of second zone conductor units (252).

Abstract translation: 一种舞台组件（10），包括（i）保持装置（26）的舞台（14）; （ii）与所述载物台（14）间隔开的反应组件（18）; （iii）移动所述载物台（14）的载物台移动器（16），所述载物台移动器（16）包括联接到所述载物台（14）的磁体阵列（38）和导体阵列（36），所述导体阵列 反应组件（18）; （iv）温度调节器（20）; 和（v）选择性地控制温度调节器（20）的控制系统（22）。 导体阵列（36）包括一组第一区导体单元（250）和一组第二区导体单元（252）。 温度调节器（20）独立地调节该组第一区导体单元（250）和该组第二区导体单元（252）的温度。

公开(公告)号：US20140204358A1

公开(公告)日：2014-07-24

申请号：US14158563

申请日：2014-01-17

Applicant: NIKON CORPORATION

Inventor： Pai-Hsueh Yang ,  Michael Binnard ,  J. Kyle Wells ,  Chetan Mahadeswaraswamy ,  Tsutomu Ogiwara

IPC: G03F7/20 ,  H02K41/03

CPC classification number: G03F7/70775 ,  G03F7/70758 ,  G03F7/7085 ,  H02K41/031 ,  H02K2201/18

Abstract: A stage assembly for positioning a device includes: (i) a stage that retains the device; (ii) a base; (iii) a mover assembly that moves the stage along a first axis, along a second axis, and along a third axis relative to the base; (iv) a magnetic sensor system that monitors the movement of the stage along the first, second and third axes, the magnetic sensor system generating a magnetic sensor signal; (v) a second sensor system that monitors the movement of the stage along the first, second and third axes, the second sensor system generating a second sensor signal; and (vi) a control system that controls the mover assembly using at least one of the magnetic sensor signal and the second sensor signal.

Abstract translation: 用于定位设备的平台组件包括：（i）保持设备的平台; （ii）基地; （iii）移动器组件，其沿着第一轴线沿着第二轴线移动所述台阶并且沿着相对于所述基座的第三轴线移动; （iv）磁传感器系统，其监测所述载物台沿着所述第一，第二和第三轴的移动，所述磁传感器系统产生磁传感器信号; （v）第二传感器系统，其监测所述载物台沿着所述第一，第二和第三轴的移动，所述第二传感器系统产生第二传感器信号; 以及（vi）控制系统，其使用所述磁传感器信号和所述第二传感器信号中的至少一个来控​​制所述动子组件。

公开(公告)号：US20180181008A1

公开(公告)日：2018-06-28

申请号：US15901045

申请日：2018-02-21

Applicant: NIKON CORPORATION

Inventor： Chetan Mahadeswaraswamy ,  Johnathan Marquez ,  Joseph P. Rossi

IPC: G03F7/20 ,  H01L21/67

CPC classification number: G03F7/70341 ,  G03F7/70716 ,  G03F7/70858 ,  G03F7/70991 ,  H01L21/67017 ,  H01L21/67109

Abstract: A stage assembly (10) that moves a device (15) includes a stage (14) that retains the device (15), a base (12), a stage mover assembly (16), and a supply system (20A). The supply system (20A) is secured to and positioned on the stage (14). The supply system (20A) includes a circulation system (24) that circulates a circulation fluid (22) through a circulation conduit (14D) in the stage (14) to control the temperature of the stage (14) and the device (15). The circulation system (24) can include a storage container assembly (234A) that defines a supply chamber (350) that supplies pressurized circulation fluid (22) to the circulation conduit (14D), a return chamber (352) that receives the circulation fluid (22) that was circulated through the circulation conduit (14D), a movable piston (354) that separates the supply chamber (350) from the return chamber (352), and a piston urger (356) that urges the piston (354) to move to reduce the supply volume of the supply chamber (350) and urge the circulation fluid (22) out of the supply chamber (350).

公开(公告)号：US20160299439A1

公开(公告)日：2016-10-13

申请号：US15094480

申请日：2016-04-08

Applicant: NIKON CORPORATION

Inventor： Chetan Mahadeswaraswamy ,  Johnathan Marquez ,  Joseph P. Rossi

IPC: G03F7/20

CPC classification number: G03F7/70341 ,  G03F7/70716 ,  G03F7/70858 ,  G03F7/70991 ,  H01L21/67017 ,  H01L21/67109

Abstract: A stage assembly (10) that moves a device (15) includes a stage (14) that retains the device (15), a base (12), a stage mover assembly (16), and a supply system (20A). The supply system (20A) is secured to and positioned on the stage (14). The supply system (20A) includes a circulation system (24) that circulates a circulation fluid (22) through a circulation conduit (14D) in the stage (14) to control the temperature of the stage (14) and the device (15). The circulation system (24) can include a storage container assembly (234A) that defines a supply chamber (350) that supplies pressurized circulation fluid (22) to the circulation conduit (14D), a return chamber (352) that receives the circulation fluid (22) that was circulated through the circulation conduit (14D), a movable piston (354) that separates the supply chamber (350) from the return chamber (352), and a piston urger (356) that urges the piston (354) to move to reduce the supply volume of the supply chamber (350) and urge the circulation fluid (22) out of the supply chamber (350).

Abstract translation: 移动设备（15）的台架组件（10）包括保持设备（15）的台（14），基座（12），平台移动器组件（16）和供应系统（20A）。 供应系统（20A）固定到台架（14）上并定位在台架（14）上。 供应系统（20A）包括循环系统（24），循环系统（24）使循环流体（22）循环通过级（14）中的循环管道（14D），以控制工作台（14）和装置（15）的温度， 。 循环系统（24）可以包括：储存容器组件（234A），其限定向循环管道（14D）供应加压循环流体（22）的供应室（350）;接收循环流体 （22），其通过循环管道（14D）循环，将供应室（350）与回流室（352）分离的可移动活塞（354）和推动活塞（354）的活塞泵（356） 移动以减小供应室（350）的供应体积并将循环流体（22）推出供应室（350）。

公开(公告)号：US10578977B2

公开(公告)日：2020-03-03

申请号：US15901045

申请日：2018-02-21

Applicant: NIKON CORPORATION

Inventor： Chetan Mahadeswaraswamy ,  Johnathan Marquez ,  Joseph P. Rossi

IPC: G03F7/20 ,  H01L21/67

Abstract: A stage assembly (10) that moves a device (15) includes a stage (14) that retains the device (15), a base (12), a stage mover assembly (16), and a supply system (20A). The supply system (20A) is secured to and positioned on the stage (14). The supply system (20A) includes a circulation system (24) that circulates a circulation fluid (22) through a circulation conduit (14D) in the stage (14) to control the temperature of the stage (14) and the device (15). The circulation system (24) can include a storage container assembly (234A) that defines a supply chamber (350) that supplies pressurized circulation fluid (22) to the circulation conduit (14D), a return chamber (352) that receives the circulation fluid (22) that was circulated through the circulation conduit (14D), a movable piston (354) that separates the supply chamber (350) from the return chamber (352), and a piston urger (356) that urges the piston (354) to move to reduce the supply volume of the supply chamber (350) and urge the circulation fluid (22) out of the supply chamber (350).

公开(公告)号：US20150098074A1

公开(公告)日：2015-04-09

申请号：US14511076

申请日：2014-10-09

Applicant: NIKON CORPORATION

Inventor： Matthew Rosa ,  Michael Binnard ,  Chetan Mahadeswaraswamy ,  W. Thomas Novak

IPC: G03F7/20

CPC classification number: G03F7/70775 ,  G03F7/70533 ,  G03F7/70725

Abstract: A stage assembly that moves a device includes a stage that retains the device, a stage mover that moves the stage, a measurement system that provides a measurement signal that relates to the position or movement of the stage, and a control system that control the stage mover. The control system can use an estimator to estimate the position of the stage in the event the measurement signal is lost. Alternatively, the control system can be used to urge the stage against a base assembly when the measurement signal is lost to inhibit the movement of the stage.

Abstract translation: 移动设备的舞台组件包括保持装置的舞台，移动舞台的舞台动力，提供与舞台的位置或运动相关的测量信号的测量系统，以及控制舞台的控制系统 移动者 控制系统可以使用估计器在测量信号丢失的情况下估计平台的位置。 或者，当测量信号丢失时，控制系统可用于将台阶推向基座组件以阻止平台的移动。

公开(公告)号：US20130069449A1

公开(公告)日：2013-03-21

申请号：US13621669

申请日：2012-09-17

Applicant: Nikon Corporation

Inventor： Michel Pharand ,  Michael B. Binnard ,  Shigeru Morimoto ,  Chetan Mahadeswaraswamy ,  Rick K. Ingram ,  Christopher Edward Hatch ,  Alex Ka Tim Poon ,  Gaurav Keswani ,  Derek Coon ,  Yeong-Jun Choi

IPC: H02K15/06 ,  H02K41/02

CPC classification number: H02K41/031 ,  H02K3/24 ,  H02K9/19 ,  H02K9/22 ,  H02K2201/18

Abstract: Coil arrays are disclosed for a planar or linear motor. An exemplary coil array includes multiple coil modules. Each coil module includes at least one coil set, respective electrical circuitry to and from the coil set, at least one respective hydraulic cooling device for the coil set, and respective hydraulic conduitry to and from the cooling device. The coil modules are interchangeably mountable relative to each other in the array such that mounting the coil module to the array produces accompanying hydraulic and electrical connections between the array and coil module, and removing the coil module from the array severs the connections.

Abstract translation: 公开了用于平面或线性电动机的线圈阵列。 示例性线圈阵列包括多个线圈模块。 每个线圈组件包括至少一个线圈组，到线圈组和来自线圈组的相应电路，用于线圈组的至少一个相应的液压冷却装置，以及往返于冷却装置的相应的液压导管。 线圈模块相对于阵列中的彼此可互换地安装，使得将线圈模块安装到阵列上产生阵列和线圈模块之间的伴随的液压和电气连接，并且从阵列中去除线圈模块以切断连接。

公开(公告)号：US09921495B2

公开(公告)日：2018-03-20

申请号：US14158563

申请日：2014-01-17

Applicant: NIKON CORPORATION

Inventor： Pai-Hsueh Yang ,  Michael Binnard ,  J. Kyle Wells ,  Chetan Mahadeswaraswamy ,  Tsutomu Ogiwara

IPC: G03B27/58 ,  G03F7/20 ,  H02K41/03

CPC classification number: G03F7/70775 ,  G03F7/70758 ,  G03F7/7085 ,  H02K41/031 ,  H02K2201/18

Abstract: A stage assembly for positioning a device includes: (i) a stage that retains the device; (ii) a base; (iii) a mover assembly that moves the stage along a first axis, along a second axis, and along a third axis relative to the base; (iv) a magnetic sensor system that monitors the movement of the stage along the first, second and third axes, the magnetic sensor system generating a magnetic sensor signal; (v) a second sensor system that monitors the movement of the stage along the first, second and third axes, the second sensor system generating a second sensor signal; and (vi) a control system that controls the mover assembly using at least one of the magnetic sensor signal and the second sensor signal.

公开(公告)号：US09904178B2

公开(公告)日：2018-02-27

申请号：US15094480

申请日：2016-04-08

Applicant: NIKON CORPORATION

Inventor： Chetan Mahadeswaraswamy ,  Johnathan Marquez ,  Joseph P. Rossi

IPC: G03F7/20 ,  H01L21/67

CPC classification number: G03F7/70341 ,  G03F7/70716 ,  G03F7/70858 ,  G03F7/70991 ,  H01L21/67017 ,  H01L21/67109

Abstract: A stage assembly (10) that moves a device (15) includes a stage (14) that retains the device (15), a base (12), a stage mover assembly (16), and a supply system (20A). The supply system (20A) is secured to and positioned on the stage (14). The supply system (20A) includes a circulation system (24) that circulates a circulation fluid (22) through a circulation conduit (14D) in the stage (14) to control the temperature of the stage (14) and the device (15). The circulation system (24) can include a storage container assembly (234A) that defines a supply chamber (350) that supplies pressurized circulation fluid (22) to the circulation conduit (14D), a return chamber (352) that receives the circulation fluid (22) that was circulated through the circulation conduit (14D), a movable piston (354) that separates the supply chamber (350) from the return chamber (352), and a piston urger (356) that urges the piston (354) to move to reduce the supply volume of the supply chamber (350) and urge the circulation fluid (22) out of the supply chamber (350).

公开(公告)号：US09778579B2

公开(公告)日：2017-10-03

申请号：US14357296

申请日：2012-11-06

Applicant: NIKON CORPORATION

Inventor： Michel Pharand ,  Chetan Mahadeswaraswamy ,  Michael B. Binnard

IPC: G03B27/32 ,  G03B27/52 ,  G03B27/58 ,  H02K41/02 ,  H02K41/03 ,  G03F7/20 ,  H01L21/68 ,  B01J19/00

CPC classification number: G03F7/70716 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00873 ,  G03F7/70758 ,  G03F7/70858 ,  G03F7/70875 ,  H01L21/682

Abstract: A stage assembly (10) that includes (i) a stage (14) that retains a device (26); (ii) a reaction assembly (18) that is spaced apart from the stage (14); (iii) a stage mover (16) that moves the stage (14), the stage mover (16) including a magnet array (38) that is coupled to the stage (14) and a conductor array (36) that is coupled to the reaction assembly (18); (iv) a temperature adjuster (20); and (v) a control system (22) that selectively controls the temperature adjuster (20). The conductor array (36) includes a set of first zone conductor units (250), and a set of second zone conductor units (252). The temperature adjuster (20) independently adjusts the temperature of the set of first zone conductor units (250), and the set of second zone conductor units (252).