公开(公告)号：US06598476B2

公开(公告)日：2003-07-29

申请号：US10100737

申请日：2002-03-19

申请人： Jiro Terada ,  Katsunori Matsubara ,  Takeshi Yamamoto

发明人： Jiro Terada ,  Katsunori Matsubara ,  Takeshi Yamamoto

IPC分类号： G01C1900

CPC分类号： G01C19/5642

摘要： Here disclosed is an angular velocity sensor with much accuracy, not allowing other vibration components to mix into the Coriolis force component. The angular velocity sensor contains a first through a fifth beams: the first, the second, and the third beams have a length of substantially the same and disposed in a substantially parallel arrangement on a substantially the same plane—with the first beam placed between the second and the third; the fourth connects each one end of the first through the third, while the fifth connects each other end of them. The first beam is supportively fixed at its mid-portion. The first beam serves as a detector; the second serves as a driver; and the third serves as a monitor.

公开(公告)号：US06523410B2

公开(公告)日：2003-02-25

申请号：US09890458

申请日：2001-10-09

申请人： Katsunori Matsubara ,  Masakazu Hatanaka ,  Satoshi Ouchi ,  Junichi Yukawa

发明人： Katsunori Matsubara ,  Masakazu Hatanaka ,  Satoshi Ouchi ,  Junichi Yukawa

IPC分类号： G01P900

CPC分类号： G01C19/5607

摘要： An object of the present invention is to improve the efficiency of a driving operation of an angular rate sensor employing a tuning fork oscillator made of single crystalline piezoelectric material such as quartz. In order to achieve the object of the present invention, a tuning fork oscillator assembled directly has driver electrodes and detector electrodes provided on a first main surface, a second main surface, an outer surface, and an inner surface of a arm, respectively. The oscillator also has a driver electrode, a monitor electrode, and detector electrodes provided on a first main surface, a second main surface, an inner surface, and an outer surface of the other arm thereof, respectively. A driving voltage is supplied from a driving power source so that the two driver electrodes may be equal in the polarity while the polarity of the driver electrode is opposite to that of the driver electrodes.

摘要翻译： 本发明的目的是提高使用由诸如石英的单晶压电材料制成的音叉振荡器的角速率传感器的驱动操作的效率。 为了实现本发明的目的，直接组装的音叉振荡器分别具有设置在臂的第一主表面，第二主表面，外表面和内表面上的驱动电极和检测器电极。 振荡器还分别具有驱动电极，监视电极和设置在另一个臂的第一主表面，第二主表面，内表面和外表面上的检测器电极。 从驱动电源提供驱动电压，使得两个驱动电极的极性相等，同时驱动电极的极性与驱动电极的极性相反。