公开(公告)号：US20160207113A1

公开(公告)日：2016-07-21

申请号：US14885979

申请日：2015-10-16

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： HISAO NAGAI ,  TAKAFUMI OKUMA

IPC: B22F9/14 ,  C04B35/10 ,  C04B35/584 ,  C04B35/14

CPC classification number: B22F9/14 ,  B22F1/0018 ,  B22F2999/00 ,  C01F7/023 ,  C01P2004/64 ,  C04B35/111 ,  C04B35/14 ,  C04B35/573 ,  C04B35/591 ,  C04B35/62813 ,  C04B35/62834 ,  C04B2235/5454 ,  B22F3/003 ,  B22F2202/13

Abstract: An apparatus and a method for producing fine particles capable of increasing the production and producing fine particles at low costs by feeding a large quantity of material efficiently into the plasma. The apparatus includes a vacuum chamber, a material feeding device connected to the vacuum chamber and feeding material particles into the vacuum chamber from material feeing ports, a plurality of electrodes connected to the vacuum chamber, tip ends of which protrude into the vacuum chamber to generate plasma and a collecting device connected to the vacuum chamber and collecting fine particles, which generates discharge inside the vacuum chamber and produces the fine particles from the material, in which the material feeding ports of the material feeding device are arranged in a lower side than the plural electrodes in the vertical direction in the vacuum chamber.

Abstract translation: 通过将大量的材料有效地供给到等离子体中，能够以低成本生产能够增加生产和生产细颗粒的微粒的装置和方法。 该设备包括一个真空室，一个连接到真空室的材料供给装置，并将材料颗粒从材料供料口送入真空室;多个电极连接到真空室，其顶端突出到真空室中以产生 等离子体和收集装置连接到真空室并收集细颗粒，其在真空室内产生放电并从材料产生细颗粒，其中材料供给装置的材料供给口布置在比 在真空室中沿垂直方向的多个电极。