公开(公告)号：US4763483A

公开(公告)日：1988-08-16

申请号：US887369

申请日：1986-07-17

申请人： Donald A. Olsen

发明人： Donald A. Olsen

IPC分类号： F04B37/08 ,  B01D8/00

CPC分类号： F04B37/08 ,  Y10S417/901

摘要： The refrigerator of a cryopump is positioned within an insulating vacuum and the two stages of the refrigerator are selectively thermally coupled to first and second stage cryopanels. After initial rough pumping by an air ejector, rough pumping is completed during startup by coupling the cold first stage of the refrigerator to a first stage adsorption cryopanel. The second stage of the refrigerator is thereafter coupled to the second stage cryopanel. Thermal coupling of the refrigerator to the cryopanels is by means of spring biased thermal contacts brought into position by movement of the refrigerator. The thermal contact elements are provided with sufficiently large thermal masses to handle the large thermal loads of system startup.

摘要翻译： 低温泵的冰箱位于绝热真空中，并且冰箱的两个阶段选择性地热耦合到第一和第二阶段的低温板。 在通过空气喷射器进行初步粗抽之后，在起动期间通过将冷藏室的第一级冷却器连接到第一级吸附冷冻板来完成粗抽。 冰箱的第二阶段此后连接到第二级冷冻板。 冰箱与冷冻机的热耦合是借助于通过冰箱移动而被引入到位的弹簧偏置热接触。 热接触元件设置有足够大的热质量以处理系统启动的大热负荷。