公开(公告)号：US06318091B1

公开(公告)日：2001-11-20

申请号：US09438736

申请日：1999-11-11

申请人： John J. Varone ,  Daniel R. Jankins ,  Robert J. Lepofsky

发明人： John J. Varone ,  Daniel R. Jankins ,  Robert J. Lepofsky

IPC分类号： B01D800

CPC分类号： F04B37/08 ,  B01D8/00 ,  H01L23/445 ,  H01L2924/0002 ,  H05K7/1425 ,  H01L2924/00

摘要： A cryopump system includes an integral assembly having a refrigerator, cryopumping surfaces cooled by the refrigerator, a first electronic module for controlling the cryopump, and a second electronic module which is removably coupled to the first module. The second electronic module has a first surface abutting a complementary first surface of a housing of the first electronic module. Preferably, the first controller module has three orthogonal surfaces of approximately the same dimensions. Electronic modules can be removably coupled to each of the three surfaces. The cryopump system includes a module cap which is coupled to an end of an electronic module to shield electrical connections between two coupled electronic modules. The electronic modules comprise a channel of rectangular cross section having slots for mounting printed circuit boards.

摘要翻译： 低温泵系统包括具有冰箱的整体组件，由冰箱冷却的低温泵送表面，用于控制低温泵的第一电子模块和可拆卸地联接到第一模块的第二电子模块。 第二电子模块具有邻接第一电子模块的壳体的互补的第一表面的第一表面。 优选地，第一控制器模块具有大致相同尺寸的三个正交表面。 电子模块可以可拆卸地耦合到三个表面中的每一个。低温泵系统包括模块帽，其联接到电子模块的端部以屏蔽两个耦合的电子模块之间的电连接。 电子模块包括具有用于安装印刷电路板的槽的矩形横截面的通道。