公开(公告)号：US07474351B2

公开(公告)日：2009-01-06

申请号：US10967053

申请日：2004-10-15

申请人： Philip R. Minarik ,  Robin H. Pruss ,  Sung-Shik Yoo

发明人： Philip R. Minarik ,  Robin H. Pruss ,  Sung-Shik Yoo

IPC分类号： H04N5/225 ,  G02B13/16 ,  H01L25/00

CPC分类号： H01L27/14685 ,  H01L23/445 ,  H01L27/14618 ,  H01L27/14625 ,  H01L2924/0002 ,  H04N5/2253 ,  H04N5/2254 ,  H01L2924/00

摘要： A method of aligning a lens assembly to a focal plane array is provided. The method may comprise the steps of providing an upper cold shield which holds the lens assembly, providing a lower cold shield for holding the focal plane array, mounting the upper cold shield onto the lower cold shield, lowering the temperature of the upper and lower cold shield to a cryogenic level, translating the upper cold shield with respect to the lower cold shield until the lens assembly is aligned to the focal plane array while the upper and lower cold shields are at the cryogenic temperature levels, and fixing the upper cold shield to the lower cold shield while the upper and lower cold shields are maintained at cryogenic levels.

摘要翻译： 提供了一种将透镜组件对准焦平面阵列的方法。 该方法可以包括以下步骤：提供保持透镜组件的上部冷屏蔽，提供用于保持焦平面阵列的下部冷屏蔽，将上部冷屏蔽件安装在下部冷屏蔽件上，降低上部和下部冷藏的温度 屏蔽到低温级，将上部冷屏相对于下部冷屏平移，直到透镜组件与焦平面阵列对准，同时上部和下部冷屏处于低温温度水平，并将上部冷屏固定到 较低的冷盾，而上下冷盾保持在低温水平。

公开(公告)号：US20030172660A1

公开(公告)日：2003-09-18

申请号：US10367139

申请日：2003-02-14

发明人： Akikazu Odawara

IPC分类号： F17C013/02 ,  F17C009/02 ,  F25D023/12

CPC分类号： H01L23/445 ,  F25B19/005 ,  G01N1/42 ,  G01N27/82 ,  H01L2924/0002 ,  H01L2924/00

摘要： There is disclosed cooling apparatus for cooling a sample or sensor to the neighborhood of the boiling temperature of a liquefied gas by transporting the gas. The cooling apparatus can be run stably such that piping or needle valve acting as a medium for transporting the liquefied gas is not clogged up. The apparatus is so constructed that a gas collection port is installed in a transfer tube and that gas produced by evaporation of the liquefied gas is collected and used as a coolant for a cooling head.

摘要翻译： 公开了通过运送气体将样品或传感器冷却到液化气体的沸点附近的冷却装置。 冷却装置可以稳定地运行，使得作为输送液化气体的介质的管道或针阀不被堵塞。 该装置被构造成使得气体收集口安装在传送管中，并且通过液化气体的蒸发产生的气体被收集并用作冷却头的冷却剂。

公开(公告)号：US06621071B2

公开(公告)日：2003-09-16

申请号：US09952513

申请日：2001-09-07

申请人： Larry D. Sobel ,  Jeff Capara

发明人： Larry D. Sobel ,  Jeff Capara

IPC分类号： H01J724

CPC分类号： F25B9/02 ,  F17C13/006 ,  H01L23/445 ,  H01L2924/0002 ,  H01L2924/3011 ,  H01L2924/00

摘要： A microelectronic system includes a substrate that is preferably silicon and a microelectronic device supported on the substrate. The microelectronic device may be a light sensor that include a readout integrated circuit formed in the silicon substrate, and a light detector supported on and electrically interconnected with the readout integrated circuit. A cryocooler formed in and integral with the substrate includes a gas inflow channel formed in the substrate, an expansion nozzle formed in the substrate and receiving a gas flow from the gas inflow channel, and a gas outflow channel that receives the gas flow from the outlet of the expansion nozzle. The gas inflow channel and the gas outflow channel may be countercurrent spirals.

摘要翻译： 微电子系统包括优选硅的衬底和支撑在衬底上的微电子器件。 微电子器件可以是包括形成在硅衬底中的读出集成电路的光传感器，以及支撑在读出集成电路上并与读出集成电路电互连的光检测器。 与基板形成并且与其一体形成的低温冷却器包括形成在基板中的气体流入通道，​​形成在基板中的膨胀喷嘴并接收来自气体流入通道的气流，以及气体流出通道，其从出口 的膨胀喷嘴。 气体流入通道和气体流出通道可以是逆流螺旋。

公开(公告)号：US20030047685A1

公开(公告)日：2003-03-13

申请号：US09952513

申请日：2001-09-07

发明人： Larry D. Sobel ,  Jeff Capara

IPC分类号： G01J005/02

CPC分类号： F25B9/02 ,  F17C13/006 ,  H01L23/445 ,  H01L2924/0002 ,  H01L2924/3011 ,  H01L2924/00

摘要： A microelectronic system includes a substrate that is preferably silicon and a microelectronic device supported on the substrate. The microelectronic device may be a light sensor that include a readout integrated circuit formed in the silicon substrate, and a light detector supported on and electrically interconnected with the readout integrated circuit. A cryocooler formed in and integral with the substrate includes a gas inflow channel formed in the substrate, an expansion nozzle formed in the substrate and receiving a gas flow from the gas inflow channel, and a gas outflow channel that receives the gas flow from the outlet of the expansion nozzle. The gas inflow channel and the gas outflow channel may be countercurrent spirals.

公开(公告)号：US06184757B2

公开(公告)日：2001-02-06

申请号：US09089447

申请日：1998-06-03

申请人： Keith Ronald Rosenthal ,  Ramanlal Chhiba Mistry ,  Robert Brian Greed

发明人： Keith Ronald Rosenthal ,  Ramanlal Chhiba Mistry ,  Robert Brian Greed

IPC分类号： H01P308

CPC分类号： H01P1/30 ,  H01L23/445 ,  H01L24/45 ,  H01L24/48 ,  H01L2224/45124 ,  H01L2224/45144 ,  H01L2224/48472 ,  H01L2924/00014 ,  H01L2924/01019 ,  H01L2924/01079 ,  H01L2924/14 ,  H01L2924/3011 ,  H01L2224/45015 ,  H01L2924/207 ,  H01L2224/05599 ,  H01L2224/85399

摘要： A number of electronic modules 82, 82′, 83, 83′ are mounted on a cold finger 100 disposed within a sealed housing 104, 110, the interior 210 of which is evacuated. To minimize heat transfer by conduction, gaps are provided in the dielectric substrates carrying the input and output transmission lines providing signal paths between the modules and electrical connectors on the exterior sidewalls 106, 108 of the housing. The gaps are bridged by thin conductive wires, thereby providing low electrical, but high thermal, impedance at the gaps. A number of module assemblies may be stacked on a single cold finger. To allow modules to be adjusted under actual operating conditions, a cover having a number of spring-loaded screwdrivers extending through vacuum tight seals and aligned with adjustable components of the modules, may be temporarily substituted for the enclosure lid 110. The springs urge the screwdrivers out of engagement when no adjustment is being made to minimize heat transfer.

摘要翻译： 许多电子模块82,82'，83,83'安装在设置在密封壳体104,110内的冷指状物100上，其内部210被抽真空。 为了通过传导最小化热传递，在承载输入和输出传输线的电介质基板中提供间隙，从而提供模块之间的信号路径和外壳的外侧壁106,108上的电连接器。 间隙由细导线桥接，从而在间隙处提供低电，但高热阻。 多个模块组件可以堆叠在单个冷手指上。 为了允许在实际操作条件下调节模块，可以暂时取代具有延伸穿过真空密封并与模块的可调部件对准的多个弹簧加载的螺丝刀的盖子。弹簧推动螺丝刀 在不进行调整以尽量减少传热的情况下脱离接合。

公开(公告)号：US6023934A

公开(公告)日：2000-02-15

申请号：US698806

申请日：1996-08-16

申请人： Calman Gold

发明人： Calman Gold

IPC分类号： H01L23/44 ,  H05K7/20 ,  F25B19/00

CPC分类号： H05K7/20372 ,  H01L23/445 ,  H01L2924/0002

摘要： Methods and apparatus for cooling systems for cryogenic power conversion electronics are provided. The invention includes systems having electronic power conversion apparatus comprising at least one cryogenically operated semiconductor switch and at least one cryogenically operated capacitor and cooling means for cryogenically cooling the at least one cryogenically operated semiconductor switch and the at least one cryogenically operated capacitor to a temperature between 90K to 236K. The systems can also include input/output means for supplying power to said power conversion apparatus and receiving power from said power conversion apparatus. In alternative embodiments, liquid cryogens can be used in heat exchange systems in conjunction with refrigeration cold heads or heat pipes. In these embodiments, the cryogen can be recondensed if boiled.

摘要翻译： 提供了用于低温电力转换电子设备的冷却系统的方法和设备。 本发明包括具有电子功率转换装置的系统，其包括至少一个低温操作的半导体开关和至少一个低温操作的电容器和冷却装置，用于将至少一个低温操作的半导体开关和至少一个低温操作的电容器低温冷却至 90K至236K。 所述系统还可以包括用于向所述电力转换装置供电并从所述电力转换装置接收电力的输入/输出装置。 在替代实施例中，液体冷冻剂可以与制冷冷头或热管结合使用在热交换系统中。 在这些实施方案中，如果煮沸，可以重新冷凝冷冻剂。

公开(公告)号：US5598711A

公开(公告)日：1997-02-04

申请号：US575199

申请日：1995-12-20

申请人： David M. Stubbs

发明人： David M. Stubbs

IPC分类号： F25B9/02 ,  F25D19/00 ,  G01J5/06 ,  H01L23/44 ,  F25B19/02

CPC分类号： G01J5/061 ,  F25B9/02 ,  F25D19/006 ,  H01L23/445 ,  H01L2924/0002

摘要： A method for deflecting a fluid supply using a skirt. The skirt comprising a remote and a close portion (with respect to distance from a fluid impinged surface). The skirt is located in close proximity to a surface to be impinged by the fluid. The deflection method is especially suited for use in conjunction with a Joule-Thomson cryostat and can also be used in conjunction with more than one cryostat for cooling of electronic devices. The remote portion of the skirt is disposed around the nozzle or nozzles of the fluid supply so that each fluid supply (or nozzle) extends through a hole in the remote portion of the skirt. The interior surface of the close portion of the skirt extends closer to the fluid impinged surface than each nozzle. The method efficiently wets the impinged surface with a fluid providing a measure of control over the outward velocity of the fluid as it progresses along the fluid impinged surface.

摘要翻译： 一种使用裙部偏转流体供给的方法。 裙部包括远离和闭合部分（相对于流体撞击表面的距离）。 裙子位于靠近被流体撞击的表面上。 偏转方法特别适合与焦耳汤姆逊低温恒温器结合使用，也可与多个低温恒温器结合使用，以冷却电子设备。 裙部的偏远部分围绕流体供应的喷嘴或喷嘴设置，使得每个流体供应（或喷嘴）延伸穿过裙部的远程部分中的孔。 裙部的靠近部分的内表面比每个喷嘴更靠近流体冲击表面。 该方法利用流体提供冲击表面，从而当流体沿流体冲击表面前进时提供对流体向外速度的控制的测量。

公开(公告)号：US5463872A

公开(公告)日：1995-11-07

申请号：US303254

申请日：1994-09-08

申请人： David T. Vader ,  Vincent C. Vasile

发明人： David T. Vader ,  Vincent C. Vasile

IPC分类号： H01L23/44 ,  F25B19/00

CPC分类号： H01L23/445 ,  H01L2924/0002

摘要： A device and method for cryogenic cooling of electronic components. A mixture of a first non-condensible gas and a second condensible gas is provided within an insulative housing. The non-condensible gas mixture has a partial pressure equal to the desired saturation pressure of the condensible gas. The insulative housing also includes an immersion chamber for housing electronic components. The immersion chamber preferably comprises two retainer parts and provides an module retainer top and a lower coldplate retainer bottom. The module retainer top allows gas to pass through the module retainer portion freely. The condensible gas is then turned into liquid form by a provided condensing means. The condensed liquid thus forms and collects inside the immersion chamber against the coldplate retainer bottom to cool the electronic components placed within. The non-condensible gas permits the condensed liquid to be subcooled.

摘要翻译： 电子部件低温冷却的装置和方法。 第一不可冷凝气体和第二可冷凝气体的混合物设置在绝缘壳体内。 不可冷凝气体混合物具有等于可冷凝气体的期望饱和压力的分压。 绝缘壳体还包括用于容纳电子部件的浸没室。 浸没室优选地包括两个保持器部件并且提供模块固定器顶部和下部冷板保持器底部。 模块固定器顶部允许气体自由地通过模块固定器部分。 然后，可冷凝气体通过提供的冷凝装置变成液体形式。 因此，冷凝的液体在浸入室内部形成并收集在冷板固定器底部，以冷却放置在其内的电子部件。 不可冷凝的气体允许冷凝的液体被过冷。

公开(公告)号：US5457956A

公开(公告)日：1995-10-17

申请号：US333356

申请日：1994-11-02

申请人： Lyn Bowman ,  David M. Berchowitz ,  Israel Urieli

发明人： Lyn Bowman ,  David M. Berchowitz ,  Israel Urieli

IPC分类号： F02G1/04 ,  F02G1/043 ,  F25B9/00 ,  F25B9/14 ,  H01L23/34 ,  H01L23/44 ,  H01L49/00 ,  H05K7/20 ,  F01B29/10

CPC分类号： F02G1/0435 ,  F25B9/14 ,  H01L23/445 ,  F02G2250/31 ,  F02G2254/30 ,  F02G2258/10 ,  F25B2309/003 ,  F25B2400/15 ,  F25B2500/17 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/3011 ,  Y10T29/49229

摘要： A microminiature Stirling cycle engine or cooler is formed utilizing semiconductor, planar processing techniques. Such a Stirling cycle thermomechanical transducer has silicon end plates and an intermediate regenerator. The end plates are formed with diaphragms and backspaces, one end plate forming the expansion end and the opposite end plate forming the compression end, with the regenerator bonded in between. A control circuit apparatus is linked to the diaphragms for controlling the amplitude, phase and frequency of their deflections. The control circuit apparatus is adapted to operate the transducer above 500 Hz and the passages and the workspace, including those within the regenerator, expansion space and compression space, are sufficiently narrow to provide a characteristic Wolmersley number, which is characteristic of the irreversibilities generated by the oscillating flow of the working fluid in the workspace, below substantially 5 at the operating frequency above 500 Hz. Additionally, the amplitude of the vibrations of the diaphragm vibrations are sufficiently small to provide the working fluid a maximum Mach number below substantially 0.1 at an operating frequency above 500 Hz.

摘要翻译： 使用半导体，平面处理技术形成微型斯特林循环发动机或冷却器。 这种斯特林循环热机械换能器具有硅端板和中间再生器。 端板形成有隔膜和后空间，形成膨胀端的一个端板和形成压缩端的相对端板，再生器结合在其间。 控制电路装置连接到膜片，用于控制其偏转的幅度，相位和频率。 控制电路装置适用于在500Hz以上的传感器上操作，通道和工作空间（包括再生器，膨胀空间和压缩空间内的工作空间）足够窄以提供特征Wolmersley数，这是由 在工作空间中的工作流体的振荡流动，在500Hz以上的工作频率下基本上低于5。 此外，隔膜振动的振动的振幅足够小，以在500Hz以上的工作频率下使工作流体的最大马赫数大致低于0.1。

公开(公告)号：US5310440A

公开(公告)日：1994-05-10

申请号：US862160

申请日：1992-04-02

申请人： Arthur R. Zingher

发明人： Arthur R. Zingher

IPC分类号： C23F1/08 ,  C25D21/10 ,  F28D21/00 ,  F28F13/02 ,  F28F23/00 ,  H01L21/302 ,  H01L21/3065 ,  H01L23/44 ,  H01L23/473 ,  H01M8/02 ,  H05K3/00 ,  H05K3/06 ,  H05K3/18 ,  H01L21/00

CPC分类号： F28F13/02 ,  H01L23/445 ,  H01L23/4735 ,  H01M8/04074 ,  H01L2924/0002 ,  H05K3/0085

摘要： A system provides for convective transferring of material between a workpiece and a flowing fluid which chemically reacts with the workpiece. A gap is formed between the workpiece and a facesheet. The fluid is fed to supply nozzles, travels a short distance within the gap adjacent to the facesheet and exits via return nozzles. The flow cross section and flow density facilitate convective transfer at a moderate flow rate and low fluid pressure. The system is also applicable for chemical transfer such as plating or etching printed circuit boards.

摘要翻译： 系统提供了在工件和与工件发生化学反应的流动流体之间的材料的对流传递。 在工件和面板之间形成间隙。 流体被供给到供应喷嘴，在与面板相邻的间隙内短距离行进，并通过返回喷嘴离开。 流量横截面和流量密度便于中等流量和低流体压力下的对流传递。 该系统也适用于电镀或蚀刻印刷电路板等化学转印。