公开(公告)号：US20160138163A1

公开(公告)日：2016-05-19

申请号：US14899952

申请日：2013-06-27

Applicant: PICOSUN OY

Inventor： Timo Malinen ,  Väinö Kilpi

IPC: C23C16/54 ,  C23C16/455 ,  C23C16/458

CPC classification number: C23C16/545 ,  C23C16/45544 ,  C23C16/458

Abstract: An apparatus and method for forming a substrate web track with a repeating pattern into a reaction space of a deposition reactor by moving a first set of support rolls in relation to a second set of support rolls.

Abstract translation: 一种用于通过相对于第二组支撑辊移动第一组支撑辊而将具有重复图案的衬底腹板轨迹形成沉积反应器的反应空间的装置和方法。

公开(公告)号：US12297535B2

公开(公告)日：2025-05-13

申请号：US17615171

申请日：2019-06-06

Applicant: Picosun Oy

Inventor： Juhana Kostamo ,  Marko Pudas ,  Timo Malinen

IPC: C23C16/455

Abstract: A method and a substrate processing apparatus including a vertical flow reaction chamber, a flow guiding part and a substrate support at a horizontally central area of the reaction chamber, the substrate support residing underneath the flow guiding part, and the flow guiding part forcing the vertical flow from above the flow guiding part to go round the flow guiding part on its downward way towards the substrate support.

公开(公告)号：US10329662B2

公开(公告)日：2019-06-25

申请号：US15123019

申请日：2014-03-03

Applicant: Picosun Oy

Inventor： Juhana Kostamo ,  Timo Malinen ,  Väino Sammelselg ,  Jaan Aarik ,  Lauri Aarik

IPC: C23C16/04 ,  C23C16/44 ,  C23C16/455

Abstract: An apparatus and method for protecting an interior of a hollow body, where an inlet and exhaust manifold include a port assembly attachable to an opening of the hollow body is provided. The interior of the hollow body is exposed to sequential self-saturating surface reactions by sequential inlet of reactive gases via the port assembly and the opening into the interior of the hollow body, and excess gases is pumped via the opening and the port assembly out from the hollow body.