公开(公告)号：US20210028348A1

公开(公告)日：2021-01-28

申请号：US17043456

申请日：2019-03-22

Applicant: Soitec

Inventor： Jean-Marc Bethoux ,  Guillaume Besnard ,  Yann Sinquin

IPC: H01L41/335 ,  H01L41/27 ,  H01L41/312 ,  H01L45/00

Abstract: A method for separating a removable composite structure using a light flux includes supplying the removable composite structure, which successively comprises: a substrate that is transparent to the light flux; an optically absorbent layer for at least partially absorbing a light flux; a sacrificial layer adapted to dissociate subject to the application of a temperature higher than a dissociation temperature and made of a material different from that of the optically absorbent layer; and at least one layer to be separated. The method further includes applying a light flux through the substrate, the light flux being at least partly absorbed by the optically absorbent layer, so as to heat the optically absorbent layer; heating the sacrificial layer by thermal conduction from the optically absorbent layer, up to a temperature that is greater than or equal to the dissociation temperature; and dissociating the sacrificial layer under the effect of the heating.