Opening angle stabilization of micromirrors through current drive control

    公开(公告)号:US10261312B2

    公开(公告)日:2019-04-16

    申请号:US15589542

    申请日:2017-05-08

    Inventor: Elik Haran

    Abstract: An electronic device disclosed herein includes a mirror controller configured to generate a drive control signal, with a drive circuit configured to generate a drive signal for a movable mirror based upon the drive control signal. A sensing circuit is configured to sense the drive signal. The mirror controller is further configured to adjust the drive control signal as a function of the sensed drive signal.

    CIRCUIT FOR DETECTION OF FAILURE OF MOVABLE MEMS MIRROR

    公开(公告)号:US20180129036A1

    公开(公告)日:2018-05-10

    申请号:US15348087

    申请日:2016-11-10

    Abstract: Disclosed herein is a circuit for determining failure of a movable MEMS mirror. The circuit includes a mirror position sensor associated with the movable MEMS mirror and that generates an analog output as a function of angular position of the movable MEMS mirror. An analog to digital converter converts the analog output from the mirror position sensor to a digital mirror sense signal. Failure detection circuitry calculates a difference between the digital mirror sense signal at a first instant in time and the digital mirror sense signal at a second instant in time, determines whether the difference exceeds a threshold, and indicates failure of the movable MEMS mirror as a function of the difference failing to exceed the threshold.

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