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公开(公告)号：US11407943B2
公开(公告)日：2022-08-09
申请号：US16575593
申请日：2019-09-19
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Jonghee Park , Kitae Kim , Jinseock Kim , Gyu-Po Kim , Hyun-Cheol Shin , Dae-Woo Lee , Sang-Hyuk Lee
Abstract: An etching composition for a silver-containing thin film includes an inorganic acid compound, a carboxylic acid compound, a sulfonic acid compound, a glycol compound, a nitrogen-containing dicarbonyl compound, a metal-based oxidizer, and water.
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