公开(公告)号：US20240057377A1

公开(公告)日：2024-02-15

申请号：US18232226

申请日：2023-08-09

Applicant: Samsung Display Co., Ltd.

Inventor： Hiroshi OKUMURA ,  Jong Oh SEO

IPC: H10K59/12 ,  H10K59/121 ,  H10K71/40

CPC classification number: H10K59/1201 ,  H10K59/1213 ,  H10K71/40

Abstract: Provides is a manufacturing method of a display device including steps of forming a semiconductor on a substrate; applying a doping solution to the semiconductor layer; and doping by heat treating the semiconductor layer to which the doping solution is applied, wherein the doping solution includes a solvent and a dopant, and the dopant contains at least one of triethyl borate, tris(trimethylsilyl)borate, and trimethylboroxine.

公开(公告)号：US20230132252A1

公开(公告)日：2023-04-27

申请号：US17689019

申请日：2022-03-08

Applicant: Samsung Display Co., Ltd.

Inventor： Jong Oh SEO ,  Hiroshi OKUMURA ,  Jae Woo JEONG

IPC: H01L29/786 ,  H01L27/12 ,  H01L29/66

Abstract: A transistor substrate includes a substrate, a semiconductor layer overlapping the substrate, and a gate electrode overlapping the semiconductor layer. The semiconductor layer includes a channel unit, a conductive unit directly connected to an end of the channel unit, and an edge unit positioned at an edge of the conductive unit. A carbon concentration of the edge unit is higher than each of a carbon concentration of the channel unit and a carbon concentration of the conductive unit.

公开(公告)号：US20210143015A1

公开(公告)日：2021-05-13

申请号：US16907029

申请日：2020-06-19

Applicant: Samsung Display Co., Ltd.

Inventor： Hiroshi OKUMURA ,  Jong Jun BAEK ,  Byung Soo SO

IPC: H01L21/268 ,  B23K26/06 ,  H01L21/02

Abstract: A laser irradiation apparatus includes: a laser module configured to emit a laser beam; a first optical system configured to scan the laser beam emitted from the laser module along a first direction; an optical element configured to refract the laser beam emitted from the first optical system; and a substrate supporter on which a base substrate to which the laser beam refracted through the optical element reaches is arranged.