公开(公告)号：US20190088794A1

公开(公告)日：2019-03-21

申请号：US15919419

申请日：2018-03-13

Applicant: Samsung Display Co., Ltd.

Inventor： Jae Woo JEONG ,  In Cheol KO ,  Jong Jun BAEK

IPC: H01L29/786 ,  H01L21/02 ,  H01L27/12 ,  H01L27/32 ,  H01L29/417 ,  G09G3/3208

Abstract: A display device includes: a substrate including a display area at which an image is displayed with light; and a switching element on the substrate in the display area thereof. The switching element includes: a semiconductor layer; a first gate electrode; a second gate electrode connected to the first gate electrode; a fluorine-doped first insulating layer between the first gate electrode and semiconductor layer; and a fluorine-doped second insulating layer between the second gate electrode and the semiconductor layer.

公开(公告)号：US20160197165A1

公开(公告)日：2016-07-07

申请号：US14795578

申请日：2015-07-09

Applicant: Samsung Display Co., Ltd.

Inventor： Dong Il KIM ,  Joo Hyung LEE ,  Jae Woo JEONG

IPC: H01L29/66 ,  H01L21/306 ,  H01L21/3065 ,  H01L27/12 ,  H01L21/308

CPC classification number: H01L29/66765 ,  H01L21/30604 ,  H01L21/3065 ,  H01L21/3081 ,  H01L21/3085 ,  H01L27/127 ,  H01L27/1288

Abstract: Provided is a manufacturing method of a thin film transistor array panel including: formation of a gate line including a gate electrode on a substrate; formation of sequentially a gate insulating layer, an active layer, a data metal layer, and a photoresist etching mask pattern on the gate line; etching the data metal layer with the same shape as the photoresist etching mask pattern; etching the active layer by using the photoresist etching mask pattern; formation of a data line including a source electrode and a drain electrode for completing a channel region on the active layer; and formation of a pixel electrode exposing the drain electrode and electrically connected with the drain electrode, in which in the etching of the active layer, a dry-etch process is performed by using gas including at least one of NF3 and H2.

Abstract translation: 提供一种薄膜晶体管阵列面板的制造方法，包括：在基板上形成包括栅电极的栅极线; 在栅极线上依次形成栅极绝缘层，有源层，数据金属层和光致抗蚀剂蚀刻掩模图案; 以与光致抗蚀剂蚀刻掩模图案相同的形状蚀刻数据金属层; 通过使用光致抗蚀剂蚀刻掩模图案蚀刻有源层; 形成包括用于完成有源层上的沟道区的源电极和漏电极的数据线; 以及形成暴露漏电极并与漏电极电连接的像素电极，其中在有源层的蚀刻中，通过使用包括NF 3和H 2中的至少一个的气体进行干蚀刻工艺。

公开(公告)号：US20160297732A1

公开(公告)日：2016-10-13

申请号：US14865493

申请日：2015-09-25

Applicant: Samsung Display Co. Ltd. ,  ENF TECHNOLOGY CO., LTD.

Inventor： Jae Woo JEONG ,  Hong Sick PARK ,  Bong Kyun KIM ,  Seung Ho YOON ,  Sang Dai LEE ,  Young Jin PARK ,  Hyo Won PARK ,  Sang Moon YUN

IPC: C07C41/42 ,  C07C41/46 ,  B01D3/14

CPC classification number: C07C41/42 ,  B01D3/009 ,  C07C41/46 ,  C07C43/11

Abstract: Provided is a method for manufacturing a glycol based compound. The method comprises agitating a mixture of a first glycol based compound, a hydrazide based compound, and a sulfonic acid based compound, and performing fractional distillation of resultant materials of the agitating to recover a second glycol based compound having a formaldehyde content of 0 ppm.

Abstract translation: 提供一种二醇类化合物的制造方法。 该方法包括搅拌第一二醇基化合物，酰肼基化合物和磺酸基化合物的混合物，并对所得搅拌物质进行分馏，以回收甲醛含量为0ppm的第二种二醇类化合物。

公开(公告)号：US20230132252A1

公开(公告)日：2023-04-27

申请号：US17689019

申请日：2022-03-08

Applicant: Samsung Display Co., Ltd.

Inventor： Jong Oh SEO ,  Hiroshi OKUMURA ,  Jae Woo JEONG

IPC: H01L29/786 ,  H01L27/12 ,  H01L29/66

Abstract: A transistor substrate includes a substrate, a semiconductor layer overlapping the substrate, and a gate electrode overlapping the semiconductor layer. The semiconductor layer includes a channel unit, a conductive unit directly connected to an end of the channel unit, and an edge unit positioned at an edge of the conductive unit. A carbon concentration of the edge unit is higher than each of a carbon concentration of the channel unit and a carbon concentration of the conductive unit.

公开(公告)号：US20200051835A1

公开(公告)日：2020-02-13

申请号：US16535021

申请日：2019-08-07

Applicant: Samsung Display Co., Ltd.

Inventor： Byung Soo SO ,  In Cheol KO ,  Jong Jun BAEK ,  Jae Woo JEONG

IPC: H01L21/67 ,  H05B6/80

Abstract: An annealing apparatus includes: a main body configured to receive a substrate; a microwave generating unit configured to generate microwaves to be transmitted to the main body; an incidence unit configured to transmit the microwaves from the microwave generating unit to the main body; and a diffraction unit disposed between the incident unit and the main body. The diffraction unit is configured to pass the microwaves therethrough before they are transmitted to the main body.

公开(公告)号：US20190129525A1

公开(公告)日：2019-05-02

申请号：US15953047

申请日：2018-04-13

Applicant: Samsung Display Co., Ltd.

Inventor： Jae Woo JEONG ,  In Cheol KO

IPC: G06F3/041 ,  H01L27/32

CPC classification number: G06F3/041 ,  G06F3/0445 ,  G06F3/0446 ,  G06F2203/04103 ,  G06F2203/04112 ,  H01L27/323

Abstract: A touch sensor according to an exemplary embodiment includes: a substrate; a first sense electrode that is disposed on the substrate and extends in a first direction; a first insulation layer that covers the substrate and the first sense electrode; and a second sense electrode that is disposed in the first insulation layer and extends in a second direction that crosses the first direction, wherein an upper surface of the second sense electrode is disposed on the same plane as an upper surface of the first insulation layer.

公开(公告)号：US20140011352A1

公开(公告)日：2014-01-09

申请号：US13728463

申请日：2012-12-27

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jong-Hyun CHOUNG ,  In-Bae KIM ,  Seon-Il KIM ,  Hong Sick PARK ,  Jae Woo JEONG ,  Gyu-Po KIM ,  Won-Guk SEO ,  Hyun-Cheol SHIN ,  Ki-Beom LEE ,  Sam-Young CHO ,  Seung-Yeon HAN

IPC: C23F1/18 ,  H01L21/48

CPC classification number: C23F1/18 ,  C23F1/26 ,  H01L21/4814

Abstract: A metal wire etchant including persulfate, a sulfonate, a fluorine compound, an azole-based compound, an organic acid, a nitrate, and a chlorine compound, and a method of making the same.

Abstract translation: 包括过硫酸盐，磺酸盐，氟化合物，唑类化合物，有机酸，硝酸盐和氯化合物的金属线蚀刻剂及其制备方法。