公开(公告)号：US20170369983A1

公开(公告)日：2017-12-28

申请号：US15630206

申请日：2017-06-22

Applicant: Samsung Display Co., Ltd.

Inventor： Sangmin YI

IPC: C23C14/04 ,  C23F1/00 ,  C23C14/18

CPC classification number: C23C14/042 ,  C23C14/185 ,  C23F1/00

Abstract: A mask assembly for thin film deposition and a method of manufacturing the same. The mask assembly includes a glass mask having a first surface and a second surface opposite the first surface, a first metal layer patterned above the first surface of the glass mask, and a second metal layer patterned below the second surface of the glass mask. A plurality of deposition areas are arranged on the glass mask, and a plurality of deposition pattern portions each having a plurality of slits are patterned in the plurality of deposition areas.