公开(公告)号：US20140198322A1

公开(公告)日：2014-07-17

申请号：US14040098

申请日：2013-09-27

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kwang Soo Kim ,  Hyun-Jae Lee ,  Myoung-Ki Ahn ,  Byeong-Hwan Jeon

IPC: G01B11/24

CPC classification number: G01B11/24

Abstract: A profile measurement system includes a light source configured to generate light. A beam shaper configured to shape the light generated from the light source. A beam splitter configured to partially transmit and reflect the light shaped by the beam shaper. An object lens configured to receive the light from the beam splitter and irradiate the light to a stage in which a workpiece is mounted. A profile estimating part has a plurality of continuously varying focal points. The profile estimating part includes a focusing lens and a light detector configured to receive the light transmitted through the focusing lens.

Abstract translation: 轮廓测量系统包括被配置为产生光的光源。 一种光束整形器，被配置成对从光源产生的光进行成形。 分束器，其被配置为部分地透射和反射由光束整形器成形的光。 一种被配置为从分束器接收光并将光照射到其中安装工件的台的物镜。 轮廓估计部具有多个连续变化的焦点。 轮廓估计部分包括聚焦透镜和配置成接收透过聚焦透镜的光的光检测器。