公开(公告)号：US07716991B2

公开(公告)日：2010-05-18

申请号：US12192594

申请日：2008-08-15

申请人： Bongyoung Ahn ,  Seung Hyun Cho ,  Seung Soo Hong ,  Yong Hyeon Shin ,  Kwang Hwa Chung

发明人： Bongyoung Ahn ,  Seung Hyun Cho ,  Seung Soo Hong ,  Yong Hyeon Shin ,  Kwang Hwa Chung

IPC分类号： G01L11/00

CPC分类号： G01L11/06

摘要： The present invention relates to an apparatus for measuring pressure inside a predetermined vessel based on the principle that the transmitting efficiency of ultrasonic waves is changed by acoustic impedance variation according to an internal pressure. The apparatus includes an ultrasound exciting unit 20 disposed inside the vessel 10 and generating predetermined ultrasonic waves, an ultrasound receiving unit 30 disposed inside the vessel 10 and placed on the same axis line as that of the ultrasound exciting unit 20, a control unit 70 for controlling a frequency and a waveform of the excitation signal transmitted into the ultrasound exciting unit 20, and a pressure measuring unit 80 for measuring an internal pressure of the vessel 10 based on an ultrasonic signal received by the ultrasound receiving unit 30 and the excitation signal transmitted into the ultrasound exciting unit 20.

摘要翻译： 本发明涉及一种用于根据内部压力的声阻抗变化来改变超声波的发射效率的原理来测量预定容器内的压力的装置。 该装置包括设置在容器10内部并产生预定超声波的超声波激励单元20，设置在容器10内部并且放置在与超声波激励单元20相同的轴线上的超声波接收单元30，用于 控制发送到超声波激励单元20的激励信号的频率和波形;以及压力测量单元80，用于基于由超声波接收单元30接收的超声波信号和发送的激励信号来测量容器10的内部压力 进入超声波激发单元20。

公开(公告)号：US20080048663A1

公开(公告)日：2008-02-28

申请号：US11551708

申请日：2006-10-21

申请人： Seung Soo Hong ,  Kwang Hwa Chung ,  Yong Hyeon Shin

发明人： Seung Soo Hong ,  Kwang Hwa Chung ,  Yong Hyeon Shin

IPC分类号： G01N27/62

CPC分类号： G01L21/34

摘要： Disclosed herein are an apparatus for and method of measuring the composition and the pressure of the discharged gas from an ion gauge by using a residual gas analyzer. In this regard, there are provided a vacuum container 200 divided into a pressure container 210 and a discharge container 220 by means of a partition 235 having an orifice 230 formed thereon; an ion gauge 100 mounted at the pressure container 210 side of the vacuum container 200 for discharging the gas at the time of vacuum formation; a residual gas analyzer 240 mounted at the pressure container 210 side of the vacuum container 200 for measuring the composition and the pressure of the residual gas; pump means disposed at one side of the discharge container 220 of the vacuum container 200 for discharging the inside gas; and heating means disposed at the vacuum container 200 for heating the vacuum container 200 to a predetermined temperature.

公开(公告)号：US07061184B2

公开(公告)日：2006-06-13

申请号：US10896156

申请日：2004-07-21

申请人： Jung Hyung Kim ,  Yong Hyeon Shin ,  Kwang Hwa Chung ,  Sang Cheol Choi

发明人： Jung Hyung Kim ,  Yong Hyeon Shin ,  Kwang Hwa Chung ,  Sang Cheol Choi

IPC分类号： H01J7/24

CPC分类号： H01J37/32935 ,  H05H1/0062

摘要： The present invention discloses a device for measuring and monitoring electron density of plasma. The device includes a chamber filled with plasma having varying electron density; a frequency probe having transmission/receiving antennas and a pair of waveguides, one end of which is mounted in the chamber, for radiating and receiving electromagnetic waves; an electromagnetic wave generator electrically connected to one of the waveguides of the frequency probe for generating electromagnetic waves; and a frequency analyzer for scanning the frequency of received electromagnetic waves and analyzing the scanned frequency with respect to the amplitude of the received electromagnetic waves. Coupled to the rear end of the frequency probe is preferably a transfer unit having a hydraulic cylinder structure such that the frequency probe is moved in the chamber to detect the spatial distribution of electron density.

摘要翻译： 本发明公开了一种用于测量和监测等离子体的电子密度的装置。 该装置包括填充有具有变化的电子密度的等离子体的室; 具有发射/接收天线和一对波导的频率探测器，其一端安装在腔室中，用于辐射和接收电磁波; 电磁波发生器电连接到用于产生电磁波的频率探头的一个波导; 以及用于扫描接收到的电磁波的频率并且相对于所接收的电磁波的振幅来分析扫描的频率的频率分析器。 耦合到频率探头的后端优选是具有液压缸结构的传送单元，使得频率探针在腔室中移动以检测电子密度的空间分布。