Concave cavity for integrated microfabricated sensor

    公开(公告)号:US11294002B2

    公开(公告)日:2022-04-05

    申请号:US16918098

    申请日:2020-07-01

    Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to the cell body, and a second window attached to the cell body. The cell body laterally surrounds a cavity, so that both windows are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cavity has concave profiles at cell body walls, so that the cavity is wider in a central region, approximately midway between the first window and the second window, than at the first surface and at the second surface. The cell body walls of the cell body have acute interior angles at both windows. The cell body is formed using an etch process that removes material from the cell body concurrently at the first surface and the second surface, forming the acute interior angles at both the first surface and the second surface.

    Temperature gradient in microfabricated sensor cavity

    公开(公告)号:US10409227B2

    公开(公告)日:2019-09-10

    申请号:US15227929

    申请日:2016-08-03

    Abstract: A microfabricated sensor includes a sensor cell with a cell body and a window attached to the cell body. A sensor cavity containing sensor fluid material is located in cell body, open to the window. A signal path extends from a signal emitter outside the sensor cell, through the window and sensor cavity, and to a signal detector. The sensor cell may have an asymmetric thermal configuration, conducive to developing a temperature gradient in the sensor cell. One or more heaters are disposed on the sensor cell, possibly in an asymmetric configuration. Power is applied to the heaters, possibly asymmetrically, so as to develop a temperature gradient in the sensor cell with a low temperature region in the sensor cell, sufficient to condense the sensor fluid in the low temperature region, outside of the signal path.

    COMPONENT ADJUSTMENT IN A SIGNAL PATH OF AN INTEGRATED SENSOR

    公开(公告)号:US20190018084A1

    公开(公告)日:2019-01-17

    申请号:US15647466

    申请日:2017-07-12

    Abstract: An integrated sensor includes a sensor cell, a signal source, an input optical rotator, and a signal detector. The integrated sensor includes a positioner for a signal-processing component. The positioner may be a linear positioner for the signal-processing component, such as a signal source or a signal detector, or may be a rotational positioner for the signal-processing component, such as a polarizer or a polarized signal source. The signal-processing component is located on a signal path of the integrated sensor. A method of adjusting a linear position or rotational position of a signal-processing component is also disclosed. A linear position or a rotational position of the signal-processing component may be adjusted to improve performance of the integrated sensor.

    TEMPERATURE CONTROL OF COMPONENTS ON A SUBSTRATE

    公开(公告)号:US20180341281A1

    公开(公告)日:2018-11-29

    申请号:US15602376

    申请日:2017-05-23

    Abstract: A microelectronic device includes a substrate, a first component thermally coupled to the substrate at a first area, a second component thermally coupled to the substrate at a second area, a heat source thermally coupled to the substrate at a third area, and a thermal sink thermally coupled to the substrate at a fourth area. A thermal path extends from the first, second, and third areas to the fourth area. The thermal path includes a low thermal conductivity region between the fourth area and the first, second, and third areas. A programmable thermal shunt is disposed across the low thermal conductivity region. The programmable thermal shunt is configured in one of a high thermal conductance state or a low thermal conductance state. The thermal conductance state may be changed from the high thermal conductance state to the low thermal conductance state to the other state, or vice versa.

    TEMPERATURE GRADIENT IN MICROFABRICATED SENSOR CAVITY

    公开(公告)号:US20180038921A1

    公开(公告)日:2018-02-08

    申请号:US15227929

    申请日:2016-08-03

    CPC classification number: G04F5/14 G01R33/00 G01R33/64

    Abstract: A microfabricated sensor includes a sensor cell with a cell body and a window attached to the cell body. A sensor cavity containing sensor fluid material is located in cell body, open to the window. A signal path extends from a signal emitter outside the sensor cell, through the window and sensor cavity, and to a signal detector. The sensor cell may have an asymmetric thermal configuration, conducive to developing a temperature gradient in the sensor cell. One or more heaters are disposed on the sensor cell, possibly in an asymmetric configuration. Power is applied to the heaters, possibly asymmetrically, so as to develop a temperature gradient in the sensor cell with a low temperature region in the sensor cell, sufficient to condense the sensor fluid in the low temperature region, outside of the signal path.

    Inductive optical sensor utilizing frontside processing of photo sensitive material
    17.
    发明授权
    Inductive optical sensor utilizing frontside processing of photo sensitive material 有权
    感光材料的前端处理感应光学传感器

    公开(公告)号:US09153726B1

    公开(公告)日:2015-10-06

    申请号:US14249967

    申请日:2014-04-10

    CPC classification number: H01L31/09 G02B6/42

    Abstract: A photodetector detects the absence or presence of light by detecting a change in the inductance of a coil. The magnetic field generated when a current flows through the coil passes through an electron-hole generation region. Charged particles in the electron-hole generation region come under the influence of the magnetic field, and generate eddy currents whose magnitudes depend on whether light is absent or present. The eddy currents generate a magnetic field that opposes the magnetic field generated by current flowing through the coil.

    Abstract translation: 光电检测器通过检测线圈的电感的变化来检测光的存在或不存在。 当电流流过线圈时产生的磁场通过电子空穴产生区域。 电子空穴产生区域中的带电粒子受到磁场的影响,并产生大小取决于光不存在或存在的涡流。 涡流产生与由流过线圈的电流产生的磁场相反的磁场。

    CONCAVE CAVITY FOR INTEGRATED MICROFABRICATED SENSOR

    公开(公告)号:US20200333406A1

    公开(公告)日:2020-10-22

    申请号:US16918098

    申请日:2020-07-01

    Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to the cell body, and a second window attached to the cell body. The cell body laterally surrounds a cavity, so that both windows are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cavity has concave profiles at cell body walls, so that the cavity is wider in a central region, approximately midway between the first window and the second window, than at the first surface and at the second surface. The cell body walls of the cell body have acute interior angles at both windows. The cell body is formed using an etch process that removes material from the cell body concurrently at the first surface and the second surface, forming the acute interior angles at both the first surface and the second surface.

    CONCAVE CAVITY FOR INTEGRATED MICROFABRICATED SENSOR

    公开(公告)号:US20180259596A1

    公开(公告)日:2018-09-13

    申请号:US15457669

    申请日:2017-03-13

    Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to the cell body, and a second window attached to the cell body. The cell body laterally surrounds a cavity, so that both windows are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cavity has concave profiles at cell body walls, so that the cavity is wider in a central region, approximately midway between the first window and the second window, than at the first surface and at the second surface. The cell body walls of the cell body have acute interior angles at both windows. The cell body is formed using an etch process that removes material from the cell body concurrently at the first surface and the second surface, forming the acute interior angles at both the first surface and the second surface.

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