公开(公告)号：US10712401B2

公开(公告)日：2020-07-14

申请号：US15457669

申请日：2017-03-13

Applicant: Texas Instruments Incorporated

Inventor： Ann Gabrys ,  Nathan Brockie ,  Terry Dyer ,  Roozbeh Parsa ,  William French

IPC: G01R33/032 ,  G04F5/14

Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to the cell body, and a second window attached to the cell body. The cell body laterally surrounds a cavity, so that both windows are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cavity has concave profiles at cell body walls, so that the cavity is wider in a central region, approximately midway between the first window and the second window, than at the first surface and at the second surface. The cell body walls of the cell body have acute interior angles at both windows. The cell body is formed using an etch process that removes material from the cell body concurrently at the first surface and the second surface, forming the acute interior angles at both the first surface and the second surface.

公开(公告)号：US10591872B2

公开(公告)日：2020-03-17

申请号：US15457608

申请日：2017-03-13

Applicant: Texas Instruments Incorporated

Inventor： Roozbeh Parsa ,  Iouri N Mirgorodski ,  William French ,  Nathan Brockie ,  Ann Gabrys ,  Terry Dyer

IPC: H01L21/00 ,  G04F5/14 ,  H03L7/26

Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to a first surface, and a second window attached to a second surface, opposite to the first window. The cell body laterally surrounds a cavity, so that the first window and the second window are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cell body has recesses on opposing exterior sides of the cell body; each recess extends from the first surface to the second surface. Exterior portions of the cell body wall in the recesses are recessed from singulation surfaces on the cell body exterior. The cell body is formed by etching the cavity and the recesses concurrently through a body substrate. After the windows are attached, the sensor cell is singulated from the body substrate through the recesses.

公开(公告)号：US10295488B2

公开(公告)日：2019-05-21

申请号：US14993073

申请日：2016-01-11

Applicant: Texas Instruments Incorporated

Inventor： Roozbeh Parsa ,  Nathan Brockie ,  Terry Dyer ,  William French ,  Iouri N Mirgorodski

IPC: G01N25/02 ,  G04F5/14 ,  H03L7/26

Abstract: A sensor cell has a chamber that defines an internal sensor volume for a sensor fluid in a vapor phase. A signal path extends into the internal sensor volume. The sensor cell includes a condensation reservoir for a condensed phase of the sensor fluid, in fluid communication with the internal sensor volume. The signal path is spatially separate from the condensation reservoir. During operation of the sensor cell, some of the sensor fluid may be converted to a vapor phase in the internal sensor volume. During such operation, sensor fluid in the condensed phase is disposed in the condensation reservoir, advantageously out of the signal path, leaving the signal path desirably free of the condensed phase sensor fluid. During periods of non-operation, a significant portion of the sensor fluid may condense from the vapor phase to the condensed phase in the condensation reservoir, advantageously out of the signal path.

公开(公告)号：US11294002B2

公开(公告)日：2022-04-05

申请号：US16918098

申请日：2020-07-01

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Ann Gabrys ,  Nathan Brockie ,  Terry Dyer ,  Roozbeh Parsa ,  William French

IPC: G01R33/032 ,  G04F5/14

Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to the cell body, and a second window attached to the cell body. The cell body laterally surrounds a cavity, so that both windows are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cavity has concave profiles at cell body walls, so that the cavity is wider in a central region, approximately midway between the first window and the second window, than at the first surface and at the second surface. The cell body walls of the cell body have acute interior angles at both windows. The cell body is formed using an etch process that removes material from the cell body concurrently at the first surface and the second surface, forming the acute interior angles at both the first surface and the second surface.

公开(公告)号：US10409227B2

公开(公告)日：2019-09-10

申请号：US15227929

申请日：2016-08-03

Applicant: Texas Instruments Incorporated

Inventor： Roozbeh Parsa ,  Iouri N Mirgorodski ,  William French ,  Nathan Brockie ,  Ann Gabrys ,  Terry Dyer

IPC: G04F5/14 ,  G01R33/00 ,  G01R33/64

Abstract: A microfabricated sensor includes a sensor cell with a cell body and a window attached to the cell body. A sensor cavity containing sensor fluid material is located in cell body, open to the window. A signal path extends from a signal emitter outside the sensor cell, through the window and sensor cavity, and to a signal detector. The sensor cell may have an asymmetric thermal configuration, conducive to developing a temperature gradient in the sensor cell. One or more heaters are disposed on the sensor cell, possibly in an asymmetric configuration. Power is applied to the heaters, possibly asymmetrically, so as to develop a temperature gradient in the sensor cell with a low temperature region in the sensor cell, sufficient to condense the sensor fluid in the low temperature region, outside of the signal path.

公开(公告)号：US20180038921A1

公开(公告)日：2018-02-08

申请号：US15227929

申请日：2016-08-03

Applicant: Texas Instruments Incorporated

Inventor： Roozbeh Parsa ,  Iouri N. Mirgorodski ,  William French ,  Nathan Brockie ,  Ann Gabrys ,  Terry Dyer

IPC: G01R33/26 ,  H03L7/26 ,  G04F5/14

CPC classification number: G04F5/14 ,  G01R33/00 ,  G01R33/64

Abstract: A microfabricated sensor includes a sensor cell with a cell body and a window attached to the cell body. A sensor cavity containing sensor fluid material is located in cell body, open to the window. A signal path extends from a signal emitter outside the sensor cell, through the window and sensor cavity, and to a signal detector. The sensor cell may have an asymmetric thermal configuration, conducive to developing a temperature gradient in the sensor cell. One or more heaters are disposed on the sensor cell, possibly in an asymmetric configuration. Power is applied to the heaters, possibly asymmetrically, so as to develop a temperature gradient in the sensor cell with a low temperature region in the sensor cell, sufficient to condense the sensor fluid in the low temperature region, outside of the signal path.

公开(公告)号：US20180259600A1

公开(公告)日：2018-09-13

申请号：US15457608

申请日：2017-03-13

Applicant: Texas Instruments Incorporated

Inventor： Roozbeh Parsa ,  Iouri N Mirgorodski ,  William French ,  Nathan Brockie ,  Ann Gabrys ,  Terry Dyer

IPC: G01R33/26

CPC classification number: G04F5/14 ,  H03L7/26

Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to a first surface, and a second window attached to a second surface, opposite to the first window. The cell body laterally surrounds a cavity, so that the first window and the second window are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cell body has recesses on opposing exterior sides of the cell body; each recess extends from the first surface to the second surface. Exterior portions of the cell body wall in the recesses are recessed from singulation surfaces on the cell body exterior. The cell body is formed by etching the cavity and the recesses concurrently through a body substrate. After the windows are attached, the sensor cell is singulated from the body substrate through the recesses.

公开(公告)号：US20200333406A1

公开(公告)日：2020-10-22

申请号：US16918098

申请日：2020-07-01

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Ann Gabrys ,  Nathan Brockie ,  Terry Dyer ,  Roozbeh Parsa ,  William French

IPC: G01R33/032 ,  G04F5/14

Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to the cell body, and a second window attached to the cell body. The cell body laterally surrounds a cavity, so that both windows are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cavity has concave profiles at cell body walls, so that the cavity is wider in a central region, approximately midway between the first window and the second window, than at the first surface and at the second surface. The cell body walls of the cell body have acute interior angles at both windows. The cell body is formed using an etch process that removes material from the cell body concurrently at the first surface and the second surface, forming the acute interior angles at both the first surface and the second surface.

公开(公告)号：US20180259596A1

公开(公告)日：2018-09-13

申请号：US15457669

申请日：2017-03-13

Applicant: Texas Instruments Incorporated

Inventor： Ann Gabrys ,  Nathan Brockie ,  Terry Dyer ,  Roozbeh Parsa ,  William French

IPC: G01R33/032 ,  G04F5/14

Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to the cell body, and a second window attached to the cell body. The cell body laterally surrounds a cavity, so that both windows are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cavity has concave profiles at cell body walls, so that the cavity is wider in a central region, approximately midway between the first window and the second window, than at the first surface and at the second surface. The cell body walls of the cell body have acute interior angles at both windows. The cell body is formed using an etch process that removes material from the cell body concurrently at the first surface and the second surface, forming the acute interior angles at both the first surface and the second surface.

公开(公告)号：US20170199138A1

公开(公告)日：2017-07-13

申请号：US14993073

申请日：2016-01-11

Applicant: Texas Instruments Incorporated

Inventor： Roozbeh Parsa ,  Nathan Brockie ,  Terry Dyer ,  William French ,  Iouri N. Mirgorodski

IPC: G01N25/02

CPC classification number: G01N25/02 ,  G04F5/14 ,  H03L7/26

Abstract: A sensor cell has a chamber that defines an internal sensor volume for a sensor fluid in a vapor phase. A signal path extends into the internal sensor volume. The sensor cell includes a condensation reservoir for a condensed phase of the sensor fluid, in fluid communication with the internal sensor volume. The signal path is spatially separate from the condensation reservoir. During operation of the sensor cell, some of the sensor fluid may be converted to a vapor phase in the internal sensor volume. During such operation, sensor fluid in the condensed phase is disposed in the condensation reservoir, advantageously out of the signal path, leaving the signal path desirably free of the condensed phase sensor fluid. During periods of non-operation, a significant portion of the sensor fluid may condense from the vapor phase to the condensed phase in the condensation reservoir, advantageously out of the signal path.