公开(公告)号：US10461145B2

公开(公告)日：2019-10-29

申请号：US15880289

申请日：2018-01-25

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Yen-Shuo Su ,  Chun-Tsung Kuo ,  Jiech-Fun Lu

IPC: H01L49/02 ,  H01F17/00 ,  H01F41/04

Abstract: A method for fabricating a magnetic core includes depositing a magnetic layer on a dielectric layer, forming a first photoresist layer on the magnetic layer and patterning the first photoresist layer, etching the magnetic layer through the patterned first photoresist layer, in which a first section of the magnetic layer exposed by the first photoresist layer remains on the dielectric layer after the magnetic layer is etched, removing the patterned first photoresist layer, forming a second photoresist layer on the magnetic layer and patterning the second photoresist layer, etching the magnetic layer through the patterned second photoresist layer, and removing the second photoresist layer.

公开(公告)号：US09893141B2

公开(公告)日：2018-02-13

申请号：US14632519

申请日：2015-02-26

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Yen-Shuo Su ,  Chun-Tsung Kuo ,  Jiech-Fun Lu

IPC: H01L49/02 ,  H01F17/00 ,  H01F41/04

CPC classification number: H01L28/10 ,  H01F17/0033 ,  H01F41/046

Abstract: A magnetic core includes a center section having a substantially uniform thickness, and an edge section connected to and surrounding the center section. The edge section includes a bottom portion and a top portion disposed on the bottom portion, in which the bottom portion has a gradual side surface since the top portion has a steep side surface. The profile of the magnetic core can be more rectangular thereby providing better inductor performance.