公开(公告)号：US20090117288A1

公开(公告)日：2009-05-07

申请号：US12257643

申请日：2008-10-24

申请人： Michael Gluck ,  Christoph Hofstetter ,  Gerd Hintz

发明人： Michael Gluck ,  Christoph Hofstetter ,  Gerd Hintz

IPC分类号： H05H1/24

CPC分类号： H01J37/32174 ,  H01J37/32082 ,  H03H7/40

摘要： Workpieces in a vacuum chamber are treated by receiving a mains voltage from a voltage supply network; generating at least one intermediate circuit voltage; generating a first RF signal of a basic frequency, and of a first phase position, from the at least one intermediate circuit voltage; generating a second RF signal of the basic frequency, and of a second phase position, from the at least one intermediate circuit voltage; and coupling the first and the second signal and generating an output signal for the vacuum chamber using a 3 dB coupler.

摘要翻译： 在真空室中的工件通过从电压网络接收电源电压来处理; 产生至少一个中间电路电压; 从所述至少一个中间电路电压产生基本频率和第一相位位置的第一RF信号; 从所述至少一个中间电路电压产生所述基本频率和第二相位位置的第二RF信号; 并耦合第一和第二信号，并使用3dB耦合器产生用于真空室的输出信号。

公开(公告)号：US08133347B2

公开(公告)日：2012-03-13

申请号：US12257643

申请日：2008-10-24

申请人： Michael Glück ,  Christoph Hofstetter ,  Gerd Hintz

发明人： Michael Glück ,  Christoph Hofstetter ,  Gerd Hintz

IPC分类号： C23F1/00 ,  H01L21/306

CPC分类号： H01J37/32174 ,  H01J37/32082 ,  H03H7/40

摘要： Workpieces in a vacuum chamber are treated by receiving a mains voltage from a voltage supply network; generating at least one intermediate circuit voltage; generating a first RF signal of a basic frequency, and of a first phase position, from the at least one intermediate circuit voltage; generating a second RF signal of the basic frequency, and of a second phase position, from the at least one intermediate circuit voltage; and coupling the first and the second signal and generating an output signal for the vacuum chamber using a 3 dB coupler.

摘要翻译： 在真空室中的工件通过从电压网络接收电源电压来处理; 产生至少一个中间电路电压; 从所述至少一个中间电路电压产生基本频率和第一相位位置的第一RF信号; 从所述至少一个中间电路电压产生所述基本频率和第二相位位置的第二RF信号; 并耦合第一和第二信号，并使用3dB耦合器产生用于真空室的输出信号。

公开(公告)号：US07452443B2

公开(公告)日：2008-11-18

申请号：US11371628

申请日：2006-03-09

申请人： Michael Glück ,  Christoph Hofstetter ,  Gerd Hintz

发明人： Michael Glück ,  Christoph Hofstetter ,  Gerd Hintz

IPC分类号： C23F1/00 ,  H01L21/306

CPC分类号： H01J37/32174 ,  H01J37/32082 ,  H03H7/40

摘要： A vacuum plasma generator is used for treating workpieces in a vacuum chamber. The vacuum plasma generator includes a mains connection for connection to a voltage supply network, and at least one mains rectifier. The at least one mains rectifier is connected to at least one first converter that generates at least one intermediate circuit voltage, a first RF signal generator, a second RF signal generator, and at least one 3 dB coupler. The first RF signal generator is connected to at least one intermediate circuit voltage, for generating a first signal of a basic frequency and of a first phase position. The second RF signal generator is connected to at least one intermediate circuit voltage, for generating a second signal of the basic frequency and of a second phase position. The least one 3 dB coupler couples the first and the second signal into an output signal of the generator.

摘要翻译： 真空等离子体发生器用于处理真空室中的工件。 真空等离子体发生器包括用于连接到电压网络的电源连接器和至少一个电源整流器。 所述至少一个电源整流器连接到至少一个产生至少一个中间电路电压的第一转换器，第一RF信号发生器，第二RF信号发生器和至少一个3dB耦合器。 第一RF信号发生器连接到至少一个中间电路电压，用于产生基本频率和第一相位位置的第一信号。 第二RF信号发生器连接到至少一个中间电路电压，用于产生基本频率和第二相位位置的第二信号。 至少一个3dB耦合器将第一和第二信号耦合到发生器的输出信号中。

公开(公告)号：US20060196426A1

公开(公告)日：2006-09-07

申请号：US11371628

申请日：2006-03-09

申请人： Michael Gluck ,  Christoph Hofstetter ,  Gerd Hintz

发明人： Michael Gluck ,  Christoph Hofstetter ,  Gerd Hintz

IPC分类号： C23C16/00

CPC分类号： H01J37/32174 ,  H01J37/32082 ,  H03H7/40

摘要： A vacuum plasma generator is used for treating workpieces in a vacuum chamber. The vacuum plasma generator includes a mains connection for connection to a voltage supply network, and at least one mains rectifier. The at least one mains rectifier is connected to at least one first converter that generates at least one intermediate circuit voltage, a first RF signal generator, a second RF signal generator, and at least one 3 dB coupler. The first RF signal generator is connected to at least one intermediate circuit voltage, for generating a first signal of a basic frequency and of a first phase position. The second RF signal generator is connected to at least one intermediate circuit voltage, for generating a second signal of the basic frequency and of a second phase position. The least one 3 dB coupler couples the first and the second signal into an output signal of the generator.

摘要翻译： 真空等离子体发生器用于处理真空室中的工件。 真空等离子体发生器包括用于连接到电压网络的电源连接器和至少一个电源整流器。 所述至少一个电源整流器连接到至少一个产生至少一个中间电路电压的第一转换器，第一RF信号发生器，第二RF信号发生器和至少一个3dB耦合器。 第一RF信号发生器连接到至少一个中间电路电压，用于产生基本频率和第一相位位置的第一信号。 第二RF信号发生器连接到至少一个中间电路电压，用于产生基本频率和第二相位位置的第二信号。 至少一个3dB耦合器将第一和第二信号耦合到发生器的输出信号中。