公开(公告)号：US11225716B2

公开(公告)日：2022-01-18

申请号：US16697516

申请日：2019-11-27

Applicant: Tokyo Electron Limited

Inventor： Melvin Verbaas ,  Anthony Dip

IPC: C23C16/455 ,  C23C16/46 ,  C23C16/458

Abstract: Internally cooled multi-hole injectors to deliver process chemicals are provided. An internal channel in an injector for the delivery system delivers process chemicals, such as a gas precursor, to a reaction space or substrate within a process chamber through multiple holes formed by outlets. A cooling delivery path and a cooling return path for cooling chemicals are positioned adjacent the supply channel to cool the process chemicals internally within the injector. The cooling process can be controlled to achieve a target cooling level for the process chemicals within the channel. In operation, undesired deposits are reduced thereby extending the time between product maintenance cycles. Further, the delivery and return flow of the cooling chemicals helps to stimulate a more evenly distributed temperature for the supply channel. Still further, the disclosed embodiments can be used in high-temperature environments, such as above about 400 degrees Celsius.

公开(公告)号：US20210175108A1

公开(公告)日：2021-06-10

申请号：US17097953

申请日：2020-11-13

Applicant: Tokyo Electron Limited

Inventor： Melvin Verbaas

IPC: H01L21/683 ,  G03F7/20

Abstract: Methods and system are disclosed for multipolar electrostatic chucks (ESCs) that provide improved clamping of microelectronic workpieces within processing equipment. The disclosed multipolar ESCs effectively clamp microelectronic workpieces including those with significant bows. Multipolar ESC embodiments include a dielectric body and multiple sets of electrodes formed within the dielectric body. Further, multiple electric fields are generated between the multiple sets of electrodes to facilitate the processing of the microelectronic workpiece. For example, a voltage generator can be used to apply voltages to the multiple sets of electrodes to generate the multiple electric fields. These electric fields can migrate charge to edges of a microelectronic workpiece and can be used to facilitate clamping of the microelectronic workpiece and/or to reduce bow in a microelectronic workpiece. Sensors can also be used to help control and improve the operation of the multipolar ESCs.