公开(公告)号：US20220403501A1

公开(公告)日：2022-12-22

申请号：US17831495

申请日：2022-06-03

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Craig Anthony Outten ,  Gregory MCGRAW ,  Xin XU

IPC: C23C14/24 ,  C23C14/12 ,  C23C14/54 ,  B41J2/14

Abstract: A deposition device including an injection block and a print die is provided, which allows for vertical movement of the injection block while still maintaining connection between the print die and external gas sources. Also disclosed is an injection block suitable for such devices, which provides improved vertical range of motion and thermal consistency compared to conventional injection block devices.

公开(公告)号：US20180342675A1

公开(公告)日：2018-11-29

申请号：US15981482

申请日：2018-05-16

Applicant: Universal Display Corporation

Inventor： Xin XU ,  Gregory MCGRAW ,  William E. QUINN

IPC: H01L51/00 ,  H01L51/50 ,  H01L51/52 ,  H05B33/10 ,  H05B33/12 ,  H01L27/32 ,  B05B12/18 ,  C23C16/455 ,  B41J2/045

Abstract: OVJP depositors and techniques for using the same are provided, in which the in-substrate plane velocity of the delivery and confinement flows are both nonzero and parallel to each other across the boundary between the two. These configurations provide improved material utilization efficiency and relaxed fly height tolerances, while achieving acceptable printing resolution and feature uniformity.