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11.
公开(公告)号:US20120243339A1
公开(公告)日:2012-09-27
申请号:US13428965
申请日:2012-03-23
Applicant: Boyoung Seo , Yongkyu Lee , Hyucksoo Yang , Yongtae Kim , Byungsup Shim
Inventor: Boyoung Seo , Yongkyu Lee , Hyucksoo Yang , Yongtae Kim , Byungsup Shim
IPC: G11C16/04 , H01L29/788
CPC classification number: G11C16/0425 , G11C16/0416 , G11C16/0483 , G11C16/12 , G11C16/3445 , H01L21/28273 , H01L27/11546 , H01L29/42328 , H01L29/7881
Abstract: Nonvolatile memory devices can include a floating gate on a substrate, with a first tunnel insulating film therebetween. A memory gate can be on the floating gate, with a blocking insulating film therebetween. A word line can be located at a first side of both the memory gate and the floating gate, with a second tunnel insulating film therebetween. The first side of the floating gate can protrude beyond the first side of the memory gate toward the word line.
Abstract translation: 非易失性存储器件可以包括衬底上的浮动栅极,其间具有第一隧道绝缘膜。 存储器栅极可以在浮动栅极上,其间具有阻挡绝缘膜。 字线可以位于存储栅极和浮动栅极的第一侧,其间具有第二隧道绝缘膜。 浮动栅极的第一侧可以突出超过存储器栅极的第一侧朝向字线。