公开(公告)号：US20020001081A1

公开(公告)日：2002-01-03

申请号：US09870954

申请日：2001-05-30

Inventor： Isao Tokumoto

IPC: G01J003/12

CPC classification number: G01J3/18

Abstract: In the monochromator, when measured beam which is diffracted by a plane diffraction grating is collected by a collimator to be returned, the measured beam is displaced by a displacement member in a direction parallel to rulings of the plane diffraction grating and is passed through a first cut-off slit having a slit of a predetermined width formed in a direction perpendicular to the direction of the rulings.

Abstract translation: 在单色仪中，当被平面衍射光栅衍射的测量光束被准直仪收集以返回时，测量光束在与平面衍射光栅的平行线平行的方向上被位移元件移位，并通过第一 切割狭缝具有沿垂直于刻线方向的方向形成的预定宽度的狭缝。